Method of fabricating inkjet printhead having planar nozzle plate
Patent 7658977 Issued on February 9, 2010. Estimated Expiration Date: 
October 24, 2027. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
October 24, 2027. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesIntegrated nozzle plate for an inkjet print head formed using a photolithographic method Process for making a heater chip module Method of manufacturing a piezoelectric print-head Multiple drop-volume printhead apparatus and method Thermal ink jet with chemical vapor deposited nozzle plate Patent #: 7322686 InventorsAssigneeApplicationNo. 11877668 filed on 10/24/2007US Classes:427/569Plasma (e.g., corona, glow discharge, cold plasma, etc.)ExaminersPrimary: Chen, BretForeign Patent References
International ClassH05H 1/24AbstractA method of fabricating an inkjet printhead is provided. The method comprises the steps of: (a) providing a partially-fabricated printhead having a first nozzle plate comprised of a first material spanning a plurality of nozzles, the first nozzle plate having a plurality of cavities; (b) filling the cavities with a filler, such that an upper surface of the first nozzle plate and an upper surface of the filler together define a contiguous planar surface; and (c) depositing a second material onto the planar surface to form a second nozzle plate having a planar exterior surface.Other References
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