Method and system for dynamically changing the transport sequencing in a cluster tool
Patent 7567851 Issued on July 28, 2009. Estimated Expiration Date: 
January 10, 2027. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
January 10, 2027. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.InventorAssigneeApplicationNo. 11621707 filed on 01/10/2007US Classes:700/103Constraints or rulesExaminersPrimary: Bahta, KidestAssistant: Laughlin, Nathan Attorney, Agent or FirmForeign Patent References
International ClassG06F 19/00AbstractBy dynamically adapting the transport sequencing rules of a cluster tool, the overall performance of the tool may be increased. In some illustrative embodiments, the transport sequencing rule for a robot handler may be dynamically changed when a lot of small size is present in one of the load ports in order to increase the window of opportunity for carrier exchange of a standard lot size currently processed. Consequently, by reducing the overall process time for the currently processed lot while delaying the completion of the small lot, the currently processed carrier may be exchanged earlier, thereby reducing the overall cycle time of the currently processed lot and/or providing a next lot earlier to the tool. | |
