Methods and arrangement for creating recipes using best-known methods
Patent 7542820 Issued on June 2, 2009. Estimated Expiration Date: 
September 28, 2026. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
September 28, 2026. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesRecipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment Method for automatic configuration of processing system Metrology tool recipe validator using best known methods Iso/nested control for soft mask processing Patent #: 7328418 InventorsAssigneeApplicationNo. 11536582 filed on 09/28/2006US Classes:700/104Knowledge based (e.g., expert system)ExaminersPrimary: Decady, AlbertAssistant: Rapp, Chad Attorney, Agent or FirmForeign Patent References
International ClassG06F 19/00AbstractA method for affecting a creation of a recipe for processing a substrate in a processing system. The method includes providing a best-known method driven recipe editor. The best-known method driven recipe editor incorporates best-known methods (BKMs), which are best practice specifications for the recipe. The method also includes creating a plurality of BKM modules based on the BKMs for the recipe. The method further includes defining rules for parameters in the plurality of BKM modules. The rules are propagated by the BKMs. The methods moreover includes creating a BKM driven recipe by employing the best-known method driven recipe editor to enter values for the parameters within the guidelines of BKM rules.Other References
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