System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer
Optical displacement measurement system
Helium- Neon laser light source generating two harmonically related, single- frequency wavelengths for use in displacement and dispersion measuring interferometry Patent #: 6724486
ApplicationNo. 11964554 filed on 12/26/2007
US Classes:385/13Including physical deformation or movement of waveguide
ExaminersPrimary: Connelly-Cushwa, Michelle R.
Assistant: Chu, Chris
Attorney, Agent or Firm
Foreign Patent References
International ClassG02B 6/00
AbstractA method for measuring micro displacements generally includes the steps of: (a) providing a micro displacement sensor with a first photonic crystal module with a number of first crystals, a second photonic crystal module with a number of second crystals, a laser, and a detector; the first crystal module and the second crystal module having a first light guide channel and a second light guide channel therein, respectively; (b) securing the second crystal module onto a sample, the first channel and the second channel being optically coupled together; and (c) during operation, emitting light from the laser, directing such light into the first channel, a first portion of the light exiting from the first channel and a second portion of the light entering the second channel, and analyzing a “light intensity vs. displacement” sine curve to obtain a horizontal micro displacement of the sample.