Methods and systems for inspecting a specimen using light scattered in different wavelength ranges

Patent 7304310 Issued on December 4, 2007. Estimated Expiration Date:

November 21, 2023. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

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Inventors

Assignee

KLA-Tencor Technologies Corp.

Application

No. 10719347 filed on 11/21/2003

US Classes:

250/372, Ultraviolet light responsive means356/237.2, Surface condition356/237.4, On patterned or topographical surface (e.g., wafer, mask, circuit board)356/237.3, Detection of object or particle on surface356/236, Integrating spheres356/394, With comparison to master, desired shape, or reference voltage356/237.1, INSPECTION OF FLAWS OR IMPURITIES250/559.4, With indication of presence of material or feature356/436Of fluent material

Examiners

Primary: Porta, Dave
Assistant: Malevic, Djura

Attorney, Agent or Firm

Baker & Mckenzie LLP

International Class

G01J 3/00

Abstract

Methods and systems for inspecting a specimen are provided. One method includes directing ultraviolet light to a specimen. The method also includes detecting light scattered from the specimen having a selected wavelength range. In addition, the method includes detecting features, defects, or light scattering properties of the specimen using signals representative of the detected light. One inspection system includes an illumination subsystem configured to direct ultraviolet light to a specimen. The system also includes a channel configured to detect light scattered from the specimen having a selected wavelength range. In addition, the system includes a processor configured to detect features, defects, or light scattering properties of the specimen using signals that are representative of the detected light.