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US Patent 7230722 - Shadow moire using non-zero talbot distance

US Patent Issued on June 12, 2007
Estimated Patent Expiration Date: Icon_subject October 19, 2025Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

A method for measuring deformation in specimens is provided. The method includes providing a shadow moiré system, the shadow moiré system including an illumination source, a reference grating and an image capture device and providing a specimen. The method further includes determining a selected distance between the specimen and the reference grating, and illuminating the specimen with light from the illumination source directed through the reference grating onto the specimen, thereby forming shadow moiré fringes onto the specimen. The method further includes capturing an image of the shadow moiré fringes by the image capture device.

Other References

  • Yeh et al., “Experimental and Analytical Investigation of Thermally Induced Warpage for Printed Wiring Boards”, 1991 IEEE, pp. 382-387.
  • Martin et al., “Measurement of Thermally Induced Warpage in Printed Wiring Boards”, AMD-Vo. 13/EEP-vol. 1, (Manufacturing processes and Materials Challenges in Microelectronic Packaging (ASME 1991), pp. 43-47.

Inventors

Assignee

Application

No. 11252789 filed on 10/19/2005

US Classes:

356/605, Moire356/618, Moire250/237G, Gratings (moire fringes)356/512, By wavefront detection369/44.24, Means to mask or shield a portion of the beam250/201.5, With optical storage medium; e.g., optical disc, etc.356/619, Quadrature detection356/35.5, By light interference detector (e.g., interferometer)250/205, Controlling light source intensity250/341.1, With irradiation or heating of object or material351/208Having means to detect proper distance or alignment (i.e., eye to instrument)

Field of Search

356/617, Coded scale356/606, Line of light projected356/615, Position transverse to viewing axis356/622, Position of detected arrangement relative to projected beam356/619, Quadrature detection356/624, Focus356/614, POSITION OR DISPLACEMENT356/625, DIMENSION356/620, Special mark or target on object356/608, Scan356/609, By focus detection356/621, Occulting a projected light beam356/618, Moire356/613, Silhouette356/602, Triangulation356/604, Pattern is series of non-intersecting lines356/623, Triangulation356/616, Having scale or grid356/612, By specular reflection356/603, Projection of structured light pattern356/601, SHAPE OR SURFACE CONFIGURATION356/607, Scan356/611, By stereo356/605, Moire356/610, By projection of coded pattern250/237G, Gratings (moire fringes)250/341.1, With irradiation or heating of object or material250/201.1, Photocell controls its own optical systems315/155, Plural radiant energy responsive devices315/153, Selective energization of the load devices315/157, Discharge control discharge device load controlled by the radiant energy responsive device315/152, Plural load devices315/159, Electric switch controlled by the radiant energy responsive device315/151, Load device irradiating the radiant energy responsive device315/150, Radiant energy responsive load device315/154, Selective electric switch controlled by the radiant energy responsive device315/156, Radiant energy control of an electric discharge device in the supply circuit of the load device315/158, Radiant energy controlled regulation of the current supply for the load device315/208Discharge control discharge device in the supply circuit

Examiners

Primary: Nguiyen, Tuan H.

Attorney, Agent or Firm

US Patent References

3858981, 4800547, Optical record carrier scanning apparatus with scanning beam focus error detection
Issued on: 01/24/1989
Inventor: Kessels ,   et al.
4972075, Automatic focusing system with dual diffraction gratings and converging means
Issued on: 11/20/1990
Inventor: Hamada, et al.
5311286, Apparatus and method for optically measuring a surface
Issued on: 05/10/1994
Inventor: Pike
5601364, Method and apparatus for measuring thermal warpage
Issued on: 02/11/1997
Inventor: Ume
5636025, System for optically measuring the surface contour of a part using more fringe techniques
Issued on: 06/03/1997
Inventor: Bieman, et al.
5898486, Portable moire interferometer and corresponding moire interferometric method
Issued on: 04/27/1999
Inventor: Chesko, Sr., et al.
6603103, Circuit for machine-vision system
Issued on: 08/05/2003
Inventor: Ulrich, et al.
6731391, Shadow moire surface measurement using Talbot effect
Issued on: 05/04/2004
Inventor: Kao, et al.
6841780Method and apparatus for detecting objects
Issued on: 01/11/2005
Inventor: Cofer, et al.

International Class

G01B 11/24

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