Method for automatic configuration of processing system

Patent 7213478 Issued on May 8, 2007. Estimated Expiration Date:

February 12, 2024. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

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Inventors

Assignee

Tokyo Electron Limited

Application

No. 10776452 filed on 02/12/2004

US Classes:

73/865.9, TESTING OF APPARATUS700/121, Integrated circuit production or semiconductor fabrication73/1.01, INSTRUMENT PROVING OR CALIBRATING700/110, Defect analysis or recognition700/174, Performance monitoring710/8, Peripheral configuration700/108, Performance monitoring716/19, DESIGN OF SEMICONDUCTOR MASK702/84, Quality control709/225Computer network access regulating

Examiners

Primary: Williams, Hezron
Assistant: Frank, Rodney

Attorney, Agent or Firm

Pillsbury Winthrop Shaw Pittman LLP

Foreign Patent References

0 643 344 EP 03/01/1995
0 686 900 EP 12/01/1995
WO 01/25865 WO 04/01/2001

International Class

G01N 19/00

Abstract

A method of automatically configuring an Advanced Process Control (APC) system for a semiconductor manufacturing environment in which an auto-configuration script is generated for executing an auto-configuration program. The auto-configuration script activates default values for input to the auto-configuration program. The auto-configuration script is executed to generate an enabled parameter file output from the auto-configuration program. The enabled parameter file identifies parameters for statistical process control (SPC) chart generation.

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