Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal
Method for measuring material thickness profiles
Apparatus for measuring material thickness profiles
Method and measuring device for measuring at least one property of moving web
Method and apparatus for measuring lateral variations in thickness or refractive index of a transparent film on a substrate
End point detection with imaging matching in semiconductor processing Patent #: 6930782
ApplicationNo. 10981177 filed on 11/04/2004
US Classes:356/503, Thickness356/479, Having a short coherence length source356/482, For distance or displacement measurement356/497, Having short coherence length source162/198, With measuring, inspecting and/or testing356/504Refraction from surfaces of different refractive index
ExaminersPrimary: Toatley, Gregory J. Jr.
Assistant: Lyons, Michael A.
Attorney, Agent or Firm
International ClassesG01B 11/02
AbstractA system and method for measuring the thickness of materials and coatings across a moving length of material such as sheet, film, or web by the use of non-contact optical interferometry is provided. Also, a system and method for evaluating the seal integrity in flexible packaging across a moving web by the use of non-contact optical interferometry is provided. Measurement of optical density and thickness, and the combination of various measurements in the production and process of manufacturing materials such as flexible packaging items that involve moving webs of material is disclosed. The present invention concerns the system and method involved in the collection and interpretation of data for these measurements and inspections.