Apparatus and method for calibration of mass flow controller
June 24, 2022. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesIntelligent mass flow controller Method and arrangement for reducing the effect of disturbances on the combustion of a fan burner system Flow sensor system and method Flow controller, parts of flow controller, and related method Method of making a flow controller Distributed interface architecture for programmable industrial control systems Flow controller, parts of flow controller, and related method Thermal mass flowmeter and mass flow controller, flowmetering system and method Method and apparatus for detecting and controlling mass flow System for remotely accessing an industrial control system over a commercial communications network InventorsAssigneeApplicationNo. 10178119 filed on 06/24/2002US Classes:702/100, Fluid or fluid flow measurement431/12, Controlling or proportioning feed73/204.15, Including detail of feedback or rebalancing circuitry137/10, By speed of fluid73/204.11Thermal typeExaminersPrimary: Nghiem, MichaelAssistant: Lau, Tung S Attorney, Agent or FirmForeign Patent References
International ClassG01F 25/00AbstractA mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.Field of SearchFluid or fluid flow measurementFluid flow investigation Flow metering Fluid measurement (e.g., mass, pressure, viscosity) Pneumatic or hydraulic system Turbine or geared meter With vehicle wheel supporting roller or belt SAMPLER, SAMPLE HANDLING, ETC. Gas By speed of fluid Responsive to change in rate of fluid flow Control by pressures across flow line valve Thermal responsive Controlling or proportioning feed Shutdown or aborted start attempt indicated By creating electric field (e.g., plasma, glow discharge, etc.) Catalytic device making Measuring breath flow or lung capacity Control of fluid level or volume | |
