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US Patent 7136767 - Apparatus and method for calibration of mass flow controller

US Patent Issued on November 14, 2006
Estimated Patent Expiration Date: Icon_subject June 24, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.

Inventors

Assignee

Application

No. 10178119 filed on 06/24/2002

US Classes:

702/100, Fluid or fluid flow measurement431/12, Controlling or proportioning feed73/204.15, Including detail of feedback or rebalancing circuitry137/10, By speed of fluid73/204.11Thermal type

Field of Search

702/100, Fluid or fluid flow measurement702/12, Fluid flow investigation702/45, Flow metering702/50, Fluid measurement (e.g., mass, pressure, viscosity)702/114, Pneumatic or hydraulic system73/1.28, Turbine or geared meter73/117, With vehicle wheel supporting roller or belt73/863, SAMPLER, SAMPLE HANDLING, ETC.73/1.06, Gas137/10, By speed of fluid137/486, Responsive to change in rate of fluid flow137/487, Control by pressures across flow line valve137/468, Thermal responsive431/12, Controlling or proportioning feed431/15, Shutdown or aborted start attempt indicated438/710, By creating electric field (e.g., plasma, glow discharge, etc.)29/890, Catalytic device making600/538, Measuring breath flow or lung capacity700/281Control of fluid level or volume

Examiners

Primary: Nghiem, Michael
Assistant: Lau, Tung S

Attorney, Agent or Firm

US Patent References

5062446, Intelligent mass flow controller
Issued on: 11/05/1991
Inventor: Anderson
5106294, Method and arrangement for reducing the effect of disturbances on the combustion of a fan burner system
Issued on: 04/21/1992
Inventor: Profos
5263369, Flow sensor system and method
Issued on: 11/23/1993
Inventor: Cutler
5660207, Flow controller, parts of flow controller, and related method
Issued on: 08/26/1997
Inventor: Mudd
5765283, Method of making a flow controller
Issued on: 06/16/1998
Inventor: Mudd
5805442, Distributed interface architecture for programmable industrial control systems
Issued on: 09/08/1998
Inventor: Crater, et al.
5850850, Flow controller, parts of flow controller, and related method
Issued on: 12/22/1998
Inventor: Mudd
5911238, Thermal mass flowmeter and mass flow controller, flowmetering system and method
Issued on: 06/15/1999
Inventor: Bump, et al.
5944048, Method and apparatus for detecting and controlling mass flow
Issued on: 08/31/1999
Inventor: Bump, et al.
6061603, System for remotely accessing an industrial control system over a commercial communications network
Issued on: 05/09/2000
Inventor: Papadopoulos, et al.
6119047, Transmitter with software for determining when to initiate diagnostics
Issued on: 09/12/2000
Inventor: Eryurek, et al.
6151625Internet web interface including programmable logic controller for controlling output devices based on status of input devices
Issued on: 11/21/2000
Inventor: Swales, et al.

Foreign Patent References

  • 0110325 EP 06/01/1984
  • 000215287 EP 03/01/1987
  • 0834723 EP 04/01/1998

International Class

G01F 25/00

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