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US Patent 7136767 - Apparatus and method for calibration of mass flow controller
US Patent Issued on November 14, 2006
Estimated Patent Expiration Date:
June 24, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
Estimated Patent Expiration Date:
June 24, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.AbstractA mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow. | InventorsAssigneeApplicationNo. 10178119 filed on 06/24/2002US Classes:702/100, Fluid or fluid flow measurement431/12, Controlling or proportioning feed73/204.15, Including detail of feedback or rebalancing circuitry137/10, By speed of fluid73/204.11Thermal typeField of Search702/100, Fluid or fluid flow measurement702/12, Fluid flow investigation702/45, Flow metering702/50, Fluid measurement (e.g., mass, pressure, viscosity)702/114, Pneumatic or hydraulic system73/1.28, Turbine or geared meter73/117, With vehicle wheel supporting roller or belt73/863, SAMPLER, SAMPLE HANDLING, ETC.73/1.06, Gas137/10, By speed of fluid137/486, Responsive to change in rate of fluid flow137/487, Control by pressures across flow line valve137/468, Thermal responsive431/12, Controlling or proportioning feed431/15, Shutdown or aborted start attempt indicated438/710, By creating electric field (e.g., plasma, glow discharge, etc.)29/890, Catalytic device making600/538, Measuring breath flow or lung capacity700/281Control of fluid level or volumeExaminersPrimary: Nghiem, MichaelAssistant: Lau, Tung S Attorney, Agent or FirmUS Patent References5062446, Intelligent mass flow controllerIssued on: 11/05/1991 Inventor: Anderson5106294, Method and arrangement for reducing the effect of disturbances on the combustion of a fan burner system Issued on: 04/21/1992 Inventor: Profos5263369, Flow sensor system and method Issued on: 11/23/1993 Inventor: Cutler5660207, Flow controller, parts of flow controller, and related method Issued on: 08/26/1997 Inventor: Mudd5765283, Method of making a flow controller Issued on: 06/16/1998 Inventor: Mudd5805442, Distributed interface architecture for programmable industrial control systems Issued on: 09/08/1998 Inventor: Crater, et al.5850850, Flow controller, parts of flow controller, and related method Issued on: 12/22/1998 Inventor: Mudd5911238, Thermal mass flowmeter and mass flow controller, flowmetering system and method Issued on: 06/15/1999 Inventor: Bump, et al.5944048, Method and apparatus for detecting and controlling mass flow Issued on: 08/31/1999 Inventor: Bump, et al.6061603, System for remotely accessing an industrial control system over a commercial communications network Issued on: 05/09/2000 Inventor: Papadopoulos, et al.6119047, Transmitter with software for determining when to initiate diagnostics Issued on: 09/12/2000 Inventor: Eryurek, et al.6151625Internet web interface including programmable logic controller for controlling output devices based on status of input devices Issued on: 11/21/2000 Inventor: Swales, et al. Foreign Patent References
International ClassG01F 25/00 |
