Method, device, computer-readable storage medium and computer program element for the computer-aided monitoring of a process parameter of a manufacturing process of a physical object
Patent 7027943 Issued on April 11, 2006. Estimated Expiration Date: 
November 12, 2023. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
November 12, 2023. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod and system for real-time statistical process monitoring Watchdog system having data differentiating means for use in monitoring of semiconductor wafer testing line Patent #: 5726920 InventorsAssigneeApplicationNo. 10712418 filed on 11/12/2003US Classes:702/81, Quality evaluation702/117, Of circuit702/182, Performance or efficiency evaluation700/110, Defect analysis or recognition700/121, Integrated circuit production or semiconductor fabrication700/24, Addressing702/108, TESTING SYSTEM378/34, Lithography438/14WITH MEASURING OR TESTINGExaminersPrimary: Hoff, Marc S.Attorney, Agent or FirmForeign Patent References
International ClassesG06F 19/00G01N 37/00 AbstractIn the case of the method for the computer-aided monitoring of process parameters of a manufacturing process of a physical object, object data which identify the physical object are assigned to various hierarchical levels, object data of various hierarchical levels are grouped to form hierarchical object data records, limit values for at least one process parameter are stored and respectively assigned to a hierarchical object data record, process data of the at least one process parameter, measured during the manufacture of physical objects, are stored and the hierarchical object data records corresponding to the object data are determined for physical objects manufactured.Other References
Field of SearchOf circuitTesting multiple circuits Including program initialization (e.g., program loading) or code selection (e.g., program creation) Including input/output or test mode selection means Including multiple test instruments Including program set up Statistical measurement Histogram distribution Probability determination Performance or efficiency evaluation Diagnostic analysis Maintenance Cause or fault identification History logging or time stamping Performance monitoring Quality control Defect analysis or recognition Worker or work station efficiency Particular manufactured product or operation Integrated circuit production or semiconductor fabrication WITH MEASURING OR TESTING | |
