Patent ReferencesProduction control system selecting optimum dispatching rule Systems, methods and computer program products for prediction of defect-related failures in integrated circuits Process control system using feed forward control threads based on material groups Patent #: 6148239 InventorsAssigneeApplicationNo. 10712417 filed on 11/12/2003US Classes:700/103, Constraints or rules700/108, Performance monitoring700/121, Integrated circuit production or semiconductor fabrication700/95, Product assembly or manufacturing716/4, Testing or evaluating438/8, Chemical etching438/5INCLUDING CONTROL RESPONSIVE TO SENSED CONDITIONExaminersPrimary: Gandhi, Jayprakash N.Attorney, Agent or FirmInternational ClassG06F 19/00AbstractIn the case of a method for monitoring of a manufacturing process of a plurality of physical objects, several rules which relate to at least one status of at least one of the plurality of physical objects are stored. Furthermore, in the case of the method, a sample is selected from the plurality of physical objects by using the several rules, with physical objects of the sample being marked in such a way that they can be subjected to a measurement, the rules being formed on the basis of the criterion that the number of measurements is reduced and redundant measurements are avoided, and it being possible in the case of the method for the several rules to be combined with one another and checked against one another. | |