U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Mass flow ratio system and method

Patent 7007707 Issued on March 7, 2006. Estimated Expiration Date: Icon_subject April 1, 2024. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

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Inventors

Assignee

Application

No. 10816084 filed on 04/01/2004

US Classes:

137/9, For producing proportionate flow137/101.19, With electrical controller137/118.04, Flow rate responsive137/487.5, Electrically actuated valve137/883, Single inlet with multiple distinctly valved outlets118/715, GAS OR VAPOR DEPOSITION702/45Flow metering

Examiners

Primary: Krishnamurthy, Ramesh

Attorney, Agent or Firm

Foreign Patent References

  • 957055 GB 05/01/1964
  • 358151614 JP 09/01/1983
  • 02000330643 JP 11/01/2000
  • 02/084422 WO 10/01/2002

International Classes

G05D 11/13
G05D 7/06

Abstract

A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a desired ratio of flow through a user interface, receive signals indicative of measured flow from the flow meters, calculate an actual ratio of flow through the flow lines based upon the measured flows, and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flow through at least one of the flow lines if the actual ratio is unequal to the desired ratio, and provide a signal indicative of the desired flow to at least one of the valves.

Other References

  • General Purpose Mass-Flo Controller (Type 1179A), MKS Instruments, Bulletin 1179A-Mar. 2000 (4 pages).
  • Types 246 & 247 Single & Four Channel Power Supply/Readout, MKS Instruments, May 1998 (2 pages).
  • Pressure/Flow Control Module (Type 250E), MKS Instruments, Bulletin 250-May 2000 (4 pages).
  • Search Report - GB 0300036.1.
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