Apparatus and method for mass flow controller with embedded web server
June 24, 2022. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesIntelligent mass flow controller Mass flow controller with supplemental condition sensors Flow sensor system and method Mass flow control system Flow controller, parts of flow controller, and related method Digital signal processor configured for multiprocessing Method of making a flow controller Distributed interface architecture for programmable industrial control systems Flow controller, parts of flow controller, and related method Dynamic gas flow controller InventorsAssigneeApplicationNo. 10178810 filed on 06/24/2002US Classes:137/487.5, Electrically actuated valve137/486, Responsive to change in rate of fluid flow700/2, Plural processors700/282, Flow control (e.g., valve or pump control)702/100, Fluid or fluid flow measurement712/36, Application specific137/2, With control of flow by a condition or characteristic of a fluid702/45, Flow metering137/10By speed of fluidExaminersPrimary: Krishnamurthy, RameshAttorney, Agent or FirmForeign Patent References
International ClassG05D 7/06AbstractA mass flow controller includes an electronic controller that provides a web server that allows access to the web server through such interworking networks as the Internet. | |
