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US Patent 7004191 - Apparatus and method for mass flow controller with embedded web server
US Patent Issued on February 28, 2006
Estimated Patent Expiration Date:
June 24, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
Estimated Patent Expiration Date:
June 24, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.AbstractA mass flow controller includes an electronic controller that provides a web server that allows access to the web server through such interworking networks as the Internet. | InventorsAssigneeApplicationNo. 10178810 filed on 06/24/2002US Classes:137/487.5, Electrically actuated valve137/486, Responsive to change in rate of fluid flow700/2, Plural processors700/282, Flow control (e.g., valve or pump control)702/100, Fluid or fluid flow measurement712/36, Application specific137/2, With control of flow by a condition or characteristic of a fluid702/45, Flow metering137/10By speed of fluidField of Search73/1.16, Volume of flow, speed of flow, volume rate of flow, or mass rate of flow73/1.35, With pressure measurement or plural flowmeters73/202.5, Thermal sensing of flow137/486, Responsive to change in rate of fluid flow137/487.5, Electrically actuated valve702/45, Flow metering702/100Fluid or fluid flow measurementExaminersPrimary: Krishnamurthy, RameshAttorney, Agent or FirmUS Patent References5062446, Intelligent mass flow controllerIssued on: 11/05/1991 Inventor: Anderson5129418, Mass flow controller with supplemental condition sensors Issued on: 07/14/1992 Inventor: Shimomura, et al.5263369, Flow sensor system and method Issued on: 11/23/1993 Inventor: Cutler5594666, Mass flow control system Issued on: 01/14/1997 Inventor: Suzuki, et al.5660207, Flow controller, parts of flow controller, and related method Issued on: 08/26/1997 Inventor: Mudd5685005, Digital signal processor configured for multiprocessing Issued on: 11/04/1997 Inventor: Garde, et al.5765283, Method of making a flow controller Issued on: 06/16/1998 Inventor: Mudd5805442, Distributed interface architecture for programmable industrial control systems Issued on: 09/08/1998 Inventor: Crater, et al.5850850, Flow controller, parts of flow controller, and related method Issued on: 12/22/1998 Inventor: Mudd5865205, Dynamic gas flow controller Issued on: 02/02/1999 Inventor: Wilmer5911238, Thermal mass flowmeter and mass flow controller, flowmetering system and method Issued on: 06/15/1999 Inventor: Bump, et al.5944048, Method and apparatus for detecting and controlling mass flow Issued on: 08/31/1999 Inventor: Bump, et al.6061603, System for remotely accessing an industrial control system over a commercial communications network Issued on: 05/09/2000 Inventor: Papadopoulos, et al.6119047, Transmitter with software for determining when to initiate diagnostics Issued on: 09/12/2000 Inventor: Eryurek, et al.6151625Internet web interface including programmable logic controller for controlling output devices based on status of input devices Issued on: 11/21/2000 Inventor: Swales, et al. Foreign Patent References
International ClassG05D 7/06 |
