Micro mirror device with adjacently suspended spring and method for the same
March 5, 2024. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesSpatial light modulator Electrodisplacive actuator for use in an actuated mirror array Methods and apparatus for a multi-electrode micromechanical optical modulator Micromechanical modulator Support post architecture for micromechanical devices Electrostatically-driven light modulator and display Micromechanical devices with spring tips Reflective display utilizing fresnel micro-reflectors Spring-ring micromechanical device Patent #: 6147790 InventorsAssigneeApplicationNo. 10793977 filed on 03/05/2004US Classes:359/295, Having multiple electrodes359/224, Reflective element moved by deformable support359/291, Shape or contour of light control surface altered359/290, By changing physical characteristics (e.g., shape, size or contours) of an optical element359/871, With support347/239, Specific light modulator345/84Light-controlling display elementsExaminersPrimary: Spector, David N.International ClassesG02B 26/00G02B 26/08 AbstractA method and apparatus providing a micro-mirror device configured to increase actuation speed thereof. The micro-mirror device includes a substrate, a mirror, a spring member and at least one adjacent micro-mirror device. The mirror is suspended over the substrate and configured to deflect in response to an actuation force. The spring member is suspended between the substrate and the mirror. Further, the spring member is configured to store energy upon being deflected by the mirror and is configured to release the stored energy to force the mirror to another position. The at least one adjacent micro-mirror device is positioned over the substrate adjacent the mirror and is configured to suspend the spring member.Field of SearchSuperimposed holograms onlyBy changing physical characteristics (e.g., shape, size or contours) of an optical element Shape or contour of light control surface altered Light control surface forms image on projected light beam Having multiple electrodes Reflective element moved by deformable support | |
