Electrostatically actuated microwave MEMS switch
July 30, 2023. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesDouble-throw miniature electromagnetic microwave (MEM) switches Micro-machine (MEMS) switch with electrical insulator Electronically latching micro-magnetic switches and method of operating same Microelectromechanical (MEMS) switch using stepped actuation electrodes Electronically latching micro-magnetic switches and method of operating same MEMS RF switch with low actuation voltage Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same Microelectromechanical (MEMS) switching apparatus Method for forming a cantilever beam model micro-electromechanical system Multi-bit phase shifters using MEM RF switches InventorsApplicationNo. 10629162 filed on 07/30/2003US Classes:333/105, Having mechanical switching means333/262, Switch385/18, Reflective-type switch333/101, Including switching means335/78, Polarity-responsive257/417, Strain sensors438/694, Combined with coating step342/371, With electronic scanning438/52, Having cantilever element310/311, Piezoelectric elements and devices200/181ELECTROSTRICTIVE OR ELECTROSTATICExaminersPrimary: Wamsley, PatrickInternational ClassesH01P001/10H01P005/12 AbstractAs the basic building block of microwave and millimeter wave units and circuits, the microwave switch must fulfill several requirements including low insertion loss, high isolation and small dimensions. For conventional electrostatically actuated microwave MEMS switches, the isolation between DC and RF is achieved using an RF choke. In this invention, a miniature electrostatically actuated microwave switch with a cantilever and employing two resistive lines on a first substrate and act as the actuation electrodes is provided. The resistive lines as the actuation electrodes according to this invention allows one to minimize the switch dimensions, to facilitate the integration and minimize the interference of the propagating microwave or millimeter wave signals. Another feature of this invention is a miniature electrostatically actuated microwave switch with a cantilever and employing two resistive lines as actuation electrodes on a first substrate, and a third resistive line on a second substrate for the de-actuation of the cantilever.Other References
Field of SearchHaving mechanical switching meansIncluding switching means Switch ELECTROSTRICTIVE OR ELECTROSTATIC RESPONSIVE TO NON-ELECTRICAL SIGNAL (E.G., CHEMICAL, STRESS, LIGHT, OR MAGNETIC FIELD SENSORS) Strain sensors Piezoelectric elements and devices Polarity-responsive With electronic scanning Reflective-type switch Having cantilever element Combined with coating step | |
