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US Patent 6948508 - Apparatus and method for self-calibration of mass flow controller

US Patent Issued on September 27, 2005
Estimated Patent Expiration Date: Icon_subject June 24, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

A mass flow controller includes a mass flow sensor and a calibrator configured to perform a self-calibration on the mass flow controller. The calibrator generates flow measurements that are used as “standards” and flow measurements from the mass flow sensor are correlated to flow measurements from the calibrator.

Inventors

Assignee

Application

No. 10178378 filed on 06/24/2002

US Classes:

137/1, PROCESSES137/486, Responsive to change in rate of fluid flow137/487.5, Electrically actuated valve73/1.35, With pressure measurement or plural flowmeters702/45, Flow metering702/100, Fluid or fluid flow measurement712/36, Application specific137/2, With control of flow by a condition or characteristic of a fluid137/10By speed of fluid

Field of Search

137/1, PROCESSES137/486, Responsive to change in rate of fluid flow137/487.5, Electrically actuated valve73/1.16, Volume of flow, speed of flow, volume rate of flow, or mass rate of flow73/1.35, With pressure measurement or plural flowmeters73/202.5, Thermal sensing of flow702/45, Flow metering702/100Fluid or fluid flow measurement

Examiners

Primary: Scherbel, David A.
Assistant: Krishnamurthy, Ramesh

Attorney, Agent or Firm

US Patent References

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Inventor: Ohmi, et al.
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Inventor: Lindner ,   et al.

Foreign Patent References

  • 0110325 EP 06/01/1984
  • 0834723 EP 04/01/1998

International Classes

G05D007/06
G01F025/00

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