U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Apparatus and method for self-calibration of mass flow controller

Patent 6948508 Issued on September 27, 2005. Estimated Expiration Date: Icon_subject June 24, 2022. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Intelligent mass flow controller
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Inventor: Anderson

Mass flow controller with supplemental condition sensors
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Inventor: Shimomura, et al.

Flow sensor system and method
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Inventor: Cutler

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Flow controller, parts of flow controller, and related method
Patent #: 5660207
Issued on: 08/26/1997
Inventor: Mudd

Digital signal processor configured for multiprocessing
Patent #: 5685005
Issued on: 11/04/1997
Inventor: Garde, et al.

Method of making a flow controller
Patent #: 5765283
Issued on: 06/16/1998
Inventor: Mudd

Distributed interface architecture for programmable industrial control systems
Patent #: 5805442
Issued on: 09/08/1998
Inventor: Crater, et al.

Flow controller, parts of flow controller, and related method
Patent #: 5850850
Issued on: 12/22/1998
Inventor: Mudd

Dynamic gas flow controller
Patent #: 5865205
Issued on: 02/02/1999
Inventor: Wilmer

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Inventors

Assignee

Application

No. 10178378 filed on 06/24/2002

US Classes:

137/1, PROCESSES137/486, Responsive to change in rate of fluid flow137/487.5, Electrically actuated valve73/1.35, With pressure measurement or plural flowmeters702/45, Flow metering702/100, Fluid or fluid flow measurement712/36, Application specific137/2, With control of flow by a condition or characteristic of a fluid137/10By speed of fluid

Examiners

Primary: Scherbel, David A.
Assistant: Krishnamurthy, Ramesh

Attorney, Agent or Firm

Foreign Patent References

  • 0110325 EP 06/01/1984
  • 0834723 EP 04/01/1998

International Classes

G05D007/06
G01F025/00

Abstract

A mass flow controller includes a mass flow sensor and a calibrator configured to perform a self-calibration on the mass flow controller. The calibrator generates flow measurements that are used as “standards” and flow measurements from the mass flow sensor are correlated to flow measurements from the calibrator.

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