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US Patent 6932098 - Apparatus and method for pressure fluctuation insensitive mass flow control

US Patent Issued on August 23, 2005
Estimated Patent Expiration Date: Icon_subject March 23, 2024Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

Inventors

Assignee

Application

No. 10806974 filed on 03/23/2004

US Classes:

137/12, By fluid pressure137/486, Responsive to change in rate of fluid flow137/487.5, Electrically actuated valve137/599.13Including flowmeter

Field of Search

137/12, By fluid pressure137/14, Involving pressure control137/486, Responsive to change in rate of fluid flow137/487.5Electrically actuated valve

Examiners

Primary: Krishnamurthy, Ramesh

Attorney, Agent or Firm

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International Class

G05D007/06

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