Apparatus and method for pressure fluctuation insensitive mass flow control
March 23, 2024. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod and apparatus for measuring and controlling volumetric flow rate of gases in a line Intelligent mass flow controller Method and apparatus for measuring mass flow and energy content using a linear flow meter Apparatus for mass flow measurement of a gas Method of making a flow controller Distributed interface architecture for programmable industrial control systems Flow controller, parts of flow controller, and related method Thermal mass flowmeter and mass flow controller, flowmetering system and method Method and apparatus for determining a rate of flow of gas by a rate of change of pressure Method and apparatus for detecting and controlling mass flow InventorsAssigneeApplicationNo. 10806974 filed on 03/23/2004US Classes:137/12, By fluid pressure137/486, Responsive to change in rate of fluid flow137/487.5, Electrically actuated valve137/599.13Including flowmeterExaminersPrimary: Krishnamurthy, RameshAttorney, Agent or FirmInternational ClassG05D007/06AbstractA mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve. | |
