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US Patent 6925213 - Micromachined fiber optic sensors
US Patent Issued on August 2, 2005
Estimated Patent Expiration Date:
March 11, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
Estimated Patent Expiration Date:
March 11, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.AbstractA novel fiber optic sensor configuration whose diameter is the same as that of the optical fiber on which it is directly fabricated is introduced. A simple MEMS-compatible fabrication process to accomplish micromachining on the fiber end face has been developed and is detailed. This sensor configuration significantly reduces the size of the sensor and makes the packaging simple and adhesive free. The micromachining process of the present invention also provides for the fabrication of arrays of sensors that would provide two dimensional maps with high spatial resolution of at least one of acoustical vibration, mechanical vibration, pressure, temperature, acceleration, electrostatic fields, magnetic fields or combinations thereof. | InventorsAssigneeApplicationNo. 10095200 filed on 03/11/2002US Classes:385/12, OPTICAL WAVEGUIDE SENSOR385/15, WITH OPTICAL COUPLER356/480, Resonant cavity73/800OpticalField of Search385/12, OPTICAL WAVEGUIDE SENSOR385/15, WITH OPTICAL COUPLER73/800, Optical73/705, Photoelectric73/715, Diaphragm356/480Resonant cavityExaminersPrimary: Font, Frank G.Assistant: Mooney, Michael P. Attorney, Agent or FirmUS Patent References5392117, Fabry-Perot optical sensing device for measuring a physical parameterIssued on: 02/21/1995 Inventor: Belleville, et al.6513390, Temperature insensitive fiber-optic torque and strain sensor Issued on: 02/04/2003 Inventor: De La Puente, et al.6567173, Optical pressure sensor Issued on: 05/20/2003 Inventor: Johannesen6738145Micromachined, etalon-based optical fiber pressure sensor Issued on: 05/18/2004 Inventor: Sherrer, et al. International ClassG02B006/26 |
