Micromachined fiber optic sensors
Patent 6925213 Issued on August 2, 2005. Estimated Expiration Date: 
March 11, 2022. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
March 11, 2022. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesFabry-Perot optical sensing device for measuring a physical parameter Temperature insensitive fiber-optic torque and strain sensor Optical pressure sensor Micromachined, etalon-based optical fiber pressure sensor Patent #: 6738145 InventorsAssigneeApplicationNo. 10095200 filed on 03/11/2002US Classes:385/12, OPTICAL WAVEGUIDE SENSOR385/15, WITH OPTICAL COUPLER356/480, Resonant cavity73/800OpticalExaminersPrimary: Font, Frank G.Assistant: Mooney, Michael P. Attorney, Agent or FirmInternational ClassG02B006/26AbstractA novel fiber optic sensor configuration whose diameter is the same as that of the optical fiber on which it is directly fabricated is introduced. A simple MEMS-compatible fabrication process to accomplish micromachining on the fiber end face has been developed and is detailed. This sensor configuration significantly reduces the size of the sensor and makes the packaging simple and adhesive free. The micromachining process of the present invention also provides for the fabrication of arrays of sensors that would provide two dimensional maps with high spatial resolution of at least one of acoustical vibration, mechanical vibration, pressure, temperature, acceleration, electrostatic fields, magnetic fields or combinations thereof. | |
