Patent ReferencesActive neural network control of wafer attributes in a plasma etch process Residual activation neural network Method and apparatus for real time monitoring of wafer attributes in a plasma etch process Model predictive controller Method and system for predicting limit cycle oscillations and control method and system utilizing same Teager-based method and system for predicting limit cycle oscillations and control method and system utilizing same Reactive ion etch loading measurement technique Method for prediction random defect yields of integrated circuits with accuracy and computation time controls Patent #: 6738954 InventorsAssigneeApplicationNo. 10645209 filed on 08/21/2003US Classes:700/44, Feed-forward (e.g., predictive)700/28, Optimization or adaptive control700/21, Failure protection or reliability700/45, Combined with feedback700/79, Having protection or reliability feature700/80, Warning or alarm700/81, Self-test700/262, Using particular manipulator orientation computation (e.g., vector/matrix calculation)714/1, Reliability and availability714/2, Fault recovery714/20, Plural recovery data sets containing set interrelation data (e.g., time values or log record numbers)714/26, Artificial intelligence (e.g., diagnostic expert system)714/57, Error forwarding and presentation (e.g., operator console, error display)361/115, With specific circuit breaker or control structure361/127, Nonlinear material (e.g., valve type)702/185, Cause or fault identification702/183, Diagnostic analysis216/60, By optical means or of an optical property700/71, Specific compensation or stabilization feature438/16, Optical characteristic sensed716/4Testing or evaluatingExaminersPrimary: Patel, RameshAttorney, Agent or FirmForeign Patent References
International ClassesG05B013/02G05B013/04 G05B013/04 AbstractFailure prediction for complex processes is performed utilizing one or more nonlinear regression models to relate operational variable values measured at two or more times to predicted process metric values and maintenance variable values.Other References
Field of SearchFailure protection or reliabilityOptimization or adaptive control Feed-forward (e.g., predictive) Combined with feedback Having protection or reliability feature Warning or alarm Self-test Using particular manipulator orientation computation (e.g., vector/matrix calculation) Reliability and availability Fault recovery Plural recovery data sets containing set interrelation data (e.g., time values or log record numbers) Artificial intelligence (e.g., diagnostic expert system) Error forwarding and presentation (e.g., operator console, error display) With specific circuit breaker or control structure Nonlinear material (e.g., valve type) Diagnostic analysis Cause or fault identification | |