Defect detection with enhanced dynamic range
September 18, 2023. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3827808 Shade determination Exposure control system for an electronic imaging camera having increased dynamic range Integrating sphere device for measuring transmission of light in objects Device for monitoring characteristics of a film on a substrate Apparatus with four light detectors for checking surface of mask with pellicle Method and apparatus for detecting foreign particle Method to image transparent media utilizing integrated scanning Defect inspecting apparatus using multiple color light to detect defects Optical thickness profiler using synthetic wavelengths InventorsAssigneeApplicationNo. 10666711 filed on 09/18/2003US Classes:356/236, Integrating spheres356/429, BY MONITORING OF WEBS OR THREAD209/582, Measuring ratio of sensed intensities250/223R, Conveyor or chute356/632, Of light permeable material348/96, Film, disc or card scanning356/319, Utilizing a spectrophotometer (i.e., plural beam)250/252.1CALIBRATION OR STANDARDIZATION METHODSExaminersPrimary: Toatley, Gregory J. Jr.Assistant: Nguyen, Son T. Attorney, Agent or FirmInternational ClassG01J001/04AbstractApparatus for optical inspection includes a source of optical radiation, which is adapted to scan a spot of the radiation over a sample, whereby the radiation is scattered from the spot. A detection system includes at least first and second detectors optically coupled to receive the scattered radiation and to generate respective first and second outputs responsive thereto, the detection system being configured so that the first detector detects variations in the scattered radiation with a greater sensitivity than the second detector, while the second detector saturates at a higher intensity of the scattered radiation than does the first detector. A signal processor is coupled to receive the first and second outputs and to determine, responsive to the outputs, locations of defects on the sample.Other References
Field of SearchPHOTOMETERSPupillary Integrating Plural detectors Multisensitivity range With predetector light modifier (e.g., diaphragm) Detector and indicator electrical coupling (e.g., amplifying or attenuating) With particular indicator Movable scale (e.g., calibrating) Comparison With light standard Variable incandescent standard Standard movable With variable light aperture size Light absorbing Absorber continuously variable (e.g., wedge) Integrating spheres CALIBRATION OR STANDARDIZATION METHODS Conveyor or chute | |
