Method, device, computer-readable memory and computer program element for the computer-aided monitoring and controlling of a manufacturing process
November 12, 2023. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesRun-to-run control process for controlling critical dimensions Cell control method and apparatus Advanced process control for semiconductor manufacturing Method and apparatus for run-to-run controlling of overlay registration Methods and apparatus for statistical process control of test Statistical in-process quality control sampling based on product stability through a systematic operation system and method Method and apparatus for interfacing a statistical process control system with a manufacturing process control framework Method and apparatus for monitoring controller performance using statistical process control Patent #: 6560503 InventorAssigneeApplicationNo. 10706615 filed on 11/12/2003US Classes:700/121, Integrated circuit production or semiconductor fabrication700/109, Quality control702/179, Statistical measurement438/17, Electrical characteristic sensed702/120, Including input/output or test mode selection means700/51, Statistical process control (SPC)700/108Performance monitoringExaminersPrimary: Picard, Leo P.Assistant: Cabrera, Zoila Attorney, Agent or FirmForeign Patent References
International ClassG06F019/00AbstractIn the case of a method for the computer-aided monitoring and controlling of a manufacturing process of a plurality of physical objects, the physical objects are subjected to at least one manufacturing step and at least one of the processed physical objects is marked according to a deterministic selection criterion in such a way that it can be subjected to a test measurement. Furthermore, the manufacturing process is controlled on the basis of the result of the test measurement of the marked object.Field of SearchIntegrated circuit production or semiconductor fabricationProduct assembly or manufacturing Performance monitoring Quality control Defect analysis or recognition Particular manufactured product or operation Statistical process control (SPC) Statistical measurement Histogram distribution Probability determination Performance or efficiency evaluation Diagnostic analysis Cause or fault identification Testing or evaluating | |
