Diaphragm valve for high-temperature precursor supply in atomic layer deposition
June 26, 2023. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3606241 Valves and operating system for expansion machines Solenoid valve for hot melt material Electromagnetic reed valve Three-way solenoid valve Solenoid valve, especially an outlet valve for infusion water Micro flow control valve Diaphragm valve Metal diaphragm valve Control valve with pressure equalization InventorsApplicationNo. 10609136 filed on 06/26/2003US Classes:137/334, WITH HEATING OR COOLING OF THE SYSTEM251/331, Diaphragm251/129.15, Including solenoid251/129.17, Having diaphragm between coil and opening controlled62/50.2, With vaporizing of liquified gas downstream of storage137/375, Jacketed118/726, Crucible or evaporator structure117/89, Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing)251/129.02, With means to bias valve open261/62, Contact space156/345.33With gas inlet structure (e.g., inlet nozzle, gas distributor)ExaminersPrimary: Lee, KevinAttorney, Agent or FirmInternational ClassesF16K049/00F16K031/04 AbstractA diaphragm valve includes a heating body that thermally contacts a valve body of the valve and extends proximal to a diaphragm of the valve opposite a valve passage through which medium flows. The heating body forms a thermally conductive pathway between the valve body and the diaphragm that facilitates maintaining an operating temperature at the diaphragm. When used in an atomic layer deposition (ALD) system, the diaphragm valve inhibits condensation or freezing of high-temperature ALD precursor gases in the valve passage. A plunger including thermally insulating features preferably extends through a central opening in the heating body to operably couple a valve actuator to the diaphragm. In some embodiments, a thermally resistive member may be interposed between the valve passage and the actuator for attenuating heat transfer between the valve passage and the actuator.Other References
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