Optical pressure sensor
December 21, 2021. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod of making silicon capacitive pressure sensor with glass layer between silicon wafers Sensor device Laminated semiconductor sensor with vibrating element Opto-electro-mechanical device or filter, process for making, and sensors made therefrom 5808210 High temperature resonant integrated microstructure sensor Resonant sensor and method of making a pressure sensor comprising a resonant beam structure Pressure sensor assembly with direct backside sensing Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators Partial-pressure sensor Patent #: 6324897 InventorsAssigneeApplicationNo. 10036629 filed on 12/21/2001US Classes:356/480Resonant cavityExaminersPrimary: Smith, Zandra V.Assistant: Lee, Andrew H. Attorney, Agent or FirmInternational ClassG01B009/02AbstractA pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected. | |
