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US Patent 6894787 - Optical pressure sensor
US Patent Issued on May 17, 2005
Estimated Patent Expiration Date:
December 21, 2021Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
Estimated Patent Expiration Date:
December 21, 2021Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.AbstractA pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected. | InventorsAssigneeApplicationNo. 10036629 filed on 12/21/2001US Classes:356/480Resonant cavityField of Search356/480, Resonant cavity356/506, Fabry-Perot type356/519Having partially reflecting plates in series (e.g., Fabry-Perot type)ExaminersPrimary: Smith, Zandra V.Assistant: Lee, Andrew H. Attorney, Agent or FirmUS Patent References4773972, Method of making silicon capacitive pressure sensor with glass layer between silicon wafersIssued on: 09/27/1988 Inventor: Mikkor4884450, Sensor device Issued on: 12/05/1989 Inventor: Greenwood, et al.5060526, Laminated semiconductor sensor with vibrating element Issued on: 10/29/1991 Inventor: Barth, et al.5559358, Opto-electro-mechanical device or filter, process for making, and sensors made therefrom Issued on: 09/24/1996 Inventor: Burns, et al. 5808210, 6031944, High temperature resonant integrated microstructure sensor Issued on: 02/29/2000 Inventor: Youngner6182513, Resonant sensor and method of making a pressure sensor comprising a resonant beam structure Issued on: 02/06/2001 Inventor: Stemme, et al.6227055, Pressure sensor assembly with direct backside sensing Issued on: 05/08/2001 Inventor: Pitzer6246638, Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators Issued on: 06/12/2001 Inventor: Zook , et al.6324897Partial-pressure sensor Issued on: 12/04/2001 Inventor: Schrenk, et al. International ClassG01B009/02 |
