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"It is my heart-warmed and world-embracing Christmas hope and aspiration that all of us, the high, the low, the rich, the poor, the admired, the despised, the loved, the hated, the civilized, the savage (every man and brother of us all throughout the whole earth), may eventually be gathered together in a heaven of everlasting rest and peace and bliss, except the inventor of the telephone. "
Mark Twain ; Christmas greetings, 1890
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US Patent 6868862 - Apparatus and method for mass flow controller with a plurality of closed loop control code sets
US Patent Issued on March 22, 2005
Estimated Patent Expiration Date:
June 24, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
Estimated Patent Expiration Date:
June 24, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.AbstractA mass flow controller includes an electronic controller for which a plurality of closed loop control codes sets may be uploaded. In a dual processor embodiment, one processor may upload a plurality of codes sets for another, with the selection of codes sets determined by the uploading processor either autonomously or through user interaction. | InventorsAssigneeApplicationNo. 10178261 filed on 06/24/2002US Classes:137/487.5, Electrically actuated valve137/486, Responsive to change in rate of fluid flow700/2, Plural processors700/282, Flow control (e.g., valve or pump control)702/100Fluid or fluid flow measurementField of Search700/2, Plural processors700/3, Master-slave700/4, Parallel700/5, Shared memory700/6, Hybrid types (analog, digital)700/282, Flow control (e.g., valve or pump control)73/1.16, Volume of flow, speed of flow, volume rate of flow, or mass rate of flow73/1.35, With pressure measurement or plural flowmeters73/202.5, Thermal sensing of flow137/486, Responsive to change in rate of fluid flow137/487.5, Electrically actuated valve702/45, Flow metering702/100Fluid or fluid flow measurementExaminersPrimary: Scherbel, David A.Assistant: Krishnamurthy, Ramesh Attorney, Agent or FirmUS Patent References5062446, Intelligent mass flow controllerIssued on: 11/05/1991 Inventor: Anderson5129418, Mass flow controller with supplemental condition sensors Issued on: 07/14/1992 Inventor: Shimomura, et al.5263369, Flow sensor system and method Issued on: 11/23/1993 Inventor: Cutler5594666, Mass flow control system Issued on: 01/14/1997 Inventor: Suzuki, et al.5660207, Flow controller, parts of flow controller, and related method Issued on: 08/26/1997 Inventor: Mudd5685005, Digital signal processor configured for multiprocessing Issued on: 11/04/1997 Inventor: Garde, et al.5765283, Method of making a flow controller Issued on: 06/16/1998 Inventor: Mudd5805442, Distributed interface architecture for programmable industrial control systems Issued on: 09/08/1998 Inventor: Crater, et al.5850850, Flow controller, parts of flow controller, and related method Issued on: 12/22/1998 Inventor: Mudd5865205, Dynamic gas flow controller Issued on: 02/02/1999 Inventor: Wilmer5911238, Thermal mass flowmeter and mass flow controller, flowmetering system and method Issued on: 06/15/1999 Inventor: Bump, et al.5944048, Method and apparatus for detecting and controlling mass flow Issued on: 08/31/1999 Inventor: Bump, et al.6061603, System for remotely accessing an industrial control system over a commercial communications network Issued on: 05/09/2000 Inventor: Papadopoulos, et al.6119047, Transmitter with software for determining when to initiate diagnostics Issued on: 09/12/2000 Inventor: Eryurek, et al.6151625, Internet web interface including programmable logic controller for controlling output devices based on status of input devices Issued on: 11/21/2000 Inventor: Swales, et al.6192281, Network accessible interface for a process control network Issued on: 02/20/2001 Inventor: Brown, et al.6216726, Wide range gas flow system with real time flow measurement and correction Issued on: 04/17/2001 Inventor: Brown, et al.6321272, Apparatus for controlling internetwork communications Issued on: 11/20/2001 Inventor: Swales6332348, Gas flow calibration of mass flow controllers Issued on: 12/25/2001 Inventor: Yelverton, et al.6333272, Gas distribution apparatus for semiconductor processing Issued on: 12/25/2001 Inventor: McMillin, et al.6343617, System and method of operation of a digital mass flow controller Issued on: 02/05/2002 Inventor: Tinsley, et al.6363958, Flow control of process gas in semiconductor manufacturing Issued on: 04/02/2002 Inventor: Ollivier6370448, Communication technique for field devices in industrial processes Issued on: 04/09/2002 Inventor: Eryurek6389364, System and method for a digital mass flow controller Issued on: 05/14/2002 Inventor: Vyers6450190, Method of detecting abnormalities in flow rate in pressure-type flow controller Issued on: 09/17/2002 Inventor: Ohmi, et al.6539968, Fluid flow controller and method of operation Issued on: 04/01/2003 Inventor: White, et al.6619258, System for controllably disabling cylinders in an internal combustion engine Issued on: 09/16/2003 Inventor: McKay , et al.6640140PLC executive with integrated web server Issued on: 10/28/2003 Inventor: Lindner , et al. Foreign Patent References
International ClassG05D007/06 |
