Polycrystalline silicon and process and apparatus for producing the same
May 9, 2021. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesProcess for producing liquid silicon Method of making magnetic bubble memory device by implanting hydrogen ions and annealing Deposition of silicon at temperatures above its melting point Deposition of silicon at temperatures above its melting point Apparatus for making molten silicon Aerosol reactor production of uniform submicron powders Material comprising silicon and process for its manufacture Fluidized bed reactor heated by microwaves Polycrystalline silicon substrate having a thermally-treated surface, and process of making the same Strontium doping of molten silicon for use in crystal growing process Patent #: 6350312 InventorsAssigneeApplicationNo. 10030657 filed on 05/09/2001US Classes:428/402, Particulate matter (e.g., sphere, flake, etc.)117/204, With means for treating single-crystal (e.g., heat treating)117/205, For forming a platelet shape or a small diameter, elongate, generally cylindrical shape (e.g., whisker, fiber, needle, filament)117/902, SPECIFIED ORIENTATION, SHAPE, CRYSTALLOGRAPHY, OR SIZE OF SEED OR SUBSTRATE117/935, Silicon from vapor or gaseous state {C30B 29/06}423/348Elemental siliconExaminersPrimary: Le, H. ThiAttorney, Agent or FirmForeign Patent References
International ClassB32B005/16AbstractFoamed polycrystalline silicon having bubbles therein and an apparent density of 2.20 g/cm3 or less. This silicon generates an extremely small amount of fine grains by crushing and can be easily crushed. There is also provided a method of producing foamed polycrystalline silicon. There is further provided a polycrystalline silicon production apparatus in which the deposition and melting of silicon are carried out on the inner surface of a cylindrical vessel, a chlorosilane feed pipe is inserted into the cylindrical vessel to a silicon molten liquid, and seal gas is supplied into a space between the cylindrical vessel and the chlorosilane feed pipe.Other References
Field of SearchParticulate matter (e.g., sphere, flake, etc.)With means for treating single-crystal (e.g., heat treating) For forming a platelet shape or a small diameter, elongate, generally cylindrical shape (e.g., whisker, fiber, needle, filament) SPECIFIED ORIENTATION, SHAPE, CRYSTALLOGRAPHY, OR SIZE OF SEED OR SUBSTRATE Silicon from vapor or gaseous state {C30B 29/06} Elemental silicon |
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