OPTICAL DEVICE SUBSTRATE FILM-FORMATION APPARATUS, OPTICAL DISK SUBSTRATE FILM-FORMATION METHOD, SUBSTRATE HOLDER MANUFACTURE METHOD, SUBSTRATE HOLDER, OPTICAL DISK AND A PHASE-CHANGE RECORDING TYPE OF OPTICAL DISK

Patent 6841049 Issued on January 11, 2005. Estimated Expiration Date:

February 4, 2020. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

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Inventors

Assignee

Ricoh Company, Ltd.

Application

No. 09498375 filed on 02/04/2000

US Classes:

204/298.15, Specified work holder204/298.25, Multi-chamber (e.g., including air lock, load/unload chamber, etc.)118/728, Work support118/729, Moving work support118/732, Porous118/719, Multizone chamber118/724, By means to heat or cool118/500, WORK HOLDERS, OR HANDLING DEVICES269/21, Vacuum-type holding means279/3, VACUUM269/91, Clamp couple element with fastening means438/691, Combined mechanical and chemical material removal428/64.7Polycarbonate containing

Examiners

Primary: McDonald, Rodney G.

Attorney, Agent or Firm

Oblon, Spivak, McClelland, Maier & Neustadt, P.C.

Foreign Patent References

55-143036 JP 11/01/1980
01-298162 JP 12/01/1989
2-273345 JP 11/01/1990
4-137526 JP 12/01/1992
06-143073 JP 05/01/1994
10-081964 JP 03/01/1998
10-162435 JP 06/01/1998

International Classes

C23C 1454
C23C 1600

Abstract

In an optical disk substrate film-formation apparatus which prepared an optical disk by forming a thin film on a substrate, the optical disk substrate is held by a holder section. A contact support surface is provided to the holder section which closely contacts at least a portion of the surface of the optical disk substrate rear to the surface where the think film is formed.