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US Patent 6822805 - Objective lens

US Patent Issued on November 23, 2004
Estimated Patent Expiration Date: Icon_subject November 18, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

An objective lens includes a first lens group, a second lens group having a lens pair, a third lens group having a lens pair, a fourth lens group having a lens pair, a fifth lens group having a lens pair, and a sixth lens group. The objective lens is configured so as to satisfy the following conditional expressions:

d/L<0.025

0.58<Rp/Rn<1.65

where L(mm) is the overall length of the objective lens; d(mm) is the air gap of each of the lens pair; Rp is the radius of curvature of each of positive refractive power surfaces opposing each other with the air gap therebetween; and Rn is the radius of curvature of a negative refractive power surface. Whereby, chromatic aberration can be corrected and resolution is exponentially improved without using a cemented lens, providing a deep ultra-violet objective lens with a high NA capable of auto focussing instantaneously.

Inventor

Assignee

Application

No. 10295821 filed on 11/18/2002

US Classes:

359/656, Microscope objective359/350HAVING SIGNIFICANT INFRARED OR ULTRAVIOLET PROPERTY

Field of Search

359/656, Microscope objective359/657, Having seven components359/658, Having six components359/368, Microscope359/350, HAVING SIGNIFICANT INFRARED OR ULTRAVIOLET PROPERTY359/355, Lens, lens system or component359/356, Infrared lens359/357, Having four or more components359/754, Multiple component lenses359/755, Seven components359/756Six components

Examiners

Primary: Schwartz, Jordan M.

Attorney, Agent or Firm

US Patent References

5440422, Method for manufacturing ultraviolet microscope dry objectives and microscope objectives manufactured in accordance with this method
Issued on: 08/08/1995
Inventor: Vollrath
5469299, Objective lens system
Issued on: 11/21/1995
Inventor: Nagano
5886826, Microscope objective
Issued on: 03/23/1999
Inventor: Amemiya
5982559, Immersion microscope objective lens system
Issued on: 11/09/1999
Inventor: Furutake
6181480, Microscope objective
Issued on: 01/30/2001
Inventor: Ito
6392814, Microscope objectives lens
Issued on: 05/21/2002
Inventor: Ono
6507442Objective lens
Issued on: 01/14/2003
Inventor: Kashima, et al.

Foreign Patent References

  • 05-072482 JP 03/01/1993
  • 10-104510 JP 04/01/1998
  • 11-167067 JP 06/01/1999
  • 11-249025 JP 09/01/1999
  • 2001-042224 JP 02/01/2001

International Class

G02B 2102

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