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AbstractA mass flow controller includes a network interface port and interface software that provide direct access to the mass flow controller. The mass flow controller also includes diagnostic software that permits a technician to execute diagnostics through the network interface port.Other References
| InventorsAssigneeApplicationNo. 10178884 filed on 06/24/2002US Classes:700/282, Flow control (e.g., valve or pump control)700/275, Mechanical control system700/281, Control of fluid level or volume137/599.05Having digital flow controllerField of Search700/1, GENERIC CONTROL SYSTEM, APPARATUS OR PROCESS700/281, Control of fluid level or volume700/275, Mechanical control system700/282, Flow control (e.g., valve or pump control)700/301, Specific application of pressure responsive control system137/599.04, Having digital flow controller137/599.05, Having digital flow controller137/486, Responsive to change in rate of fluid flow137/487.5, Electrically actuated valve702/45Flow meteringExaminersPrimary: Gandhi, Jayprakash N.Attorney, Agent or FirmUS Patent References5062446, Intelligent mass flow controllerIssued on: 11/05/1991 Inventor: Anderson5263369, Flow sensor system and method Issued on: 11/23/1993 Inventor: Cutler5660207, Flow controller, parts of flow controller, and related method Issued on: 08/26/1997 Inventor: Mudd5765283, Method of making a flow controller Issued on: 06/16/1998 Inventor: Mudd5805442, Distributed interface architecture for programmable industrial control systems Issued on: 09/08/1998 Inventor: Crater, et al.5850850, Flow controller, parts of flow controller, and related method Issued on: 12/22/1998 Inventor: Mudd5911238, Thermal mass flowmeter and mass flow controller, flowmetering system and method Issued on: 06/15/1999 Inventor: Bump, et al.5944048, Method and apparatus for detecting and controlling mass flow Issued on: 08/31/1999 Inventor: Bump, et al.6061603, System for remotely accessing an industrial control system over a commercial communications network Issued on: 05/09/2000 Inventor: Papadopoulos, et al.6119047, Transmitter with software for determining when to initiate diagnostics Issued on: 09/12/2000 Inventor: Eryurek, et al.6151625, Internet web interface including programmable logic controller for controlling output devices based on status of input devices Issued on: 11/21/2000 Inventor: Swales, et al.6192281, Network accessible interface for a process control network Issued on: 02/20/2001 Inventor: Brown, et al.6216726, Wide range gas flow system with real time flow measurement and correction Issued on: 04/17/2001 Inventor: Brown, et al.6321272, Apparatus for controlling internetwork communications Issued on: 11/20/2001 Inventor: Swales6332348, Gas flow calibration of mass flow controllers Issued on: 12/25/2001 Inventor: Yelverton, et al.6333272, Gas distribution apparatus for semiconductor processing Issued on: 12/25/2001 Inventor: McMillin, et al.6343617, System and method of operation of a digital mass flow controller Issued on: 02/05/2002 Inventor: Tinsley, et al.6370448, Communication technique for field devices in industrial processes Issued on: 04/09/2002 Inventor: Eryurek6450190, Method of detecting abnormalities in flow rate in pressure-type flow controller Issued on: 09/17/2002 Inventor: Ohmi, et al.6539968, Fluid flow controller and method of operation Issued on: 04/01/2003 Inventor: White, et al.6619258, System for controllably disabling cylinders in an internal combustion engine Issued on: 09/16/2003 Inventor: McKay , et al.6640140PLC executive with integrated web server Issued on: 10/28/2003 Inventor: Lindner , et al. Foreign Patent References
International ClassesF17D 300G05D 700 |