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US Patent 6810308 - Apparatus and method for mass flow controller with network access to diagnostics

US Patent Issued on October 26, 2004
Estimated Patent Expiration Date: Icon_subject June 24, 2022Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

A mass flow controller includes a network interface port and interface software that provide direct access to the mass flow controller. The mass flow controller also includes diagnostic software that permits a technician to execute diagnostics through the network interface port.

Other References

  • International Search Report (PCT/US03/19969).

Inventors

Assignee

Application

No. 10178884 filed on 06/24/2002

US Classes:

700/282, Flow control (e.g., valve or pump control)700/275, Mechanical control system700/281, Control of fluid level or volume137/599.05Having digital flow controller

Field of Search

700/1, GENERIC CONTROL SYSTEM, APPARATUS OR PROCESS700/281, Control of fluid level or volume700/275, Mechanical control system700/282, Flow control (e.g., valve or pump control)700/301, Specific application of pressure responsive control system137/599.04, Having digital flow controller137/599.05, Having digital flow controller137/486, Responsive to change in rate of fluid flow137/487.5, Electrically actuated valve702/45Flow metering

Examiners

Primary: Gandhi, Jayprakash N.

Attorney, Agent or Firm

US Patent References

5062446, Intelligent mass flow controller
Issued on: 11/05/1991
Inventor: Anderson
5263369, Flow sensor system and method
Issued on: 11/23/1993
Inventor: Cutler
5660207, Flow controller, parts of flow controller, and related method
Issued on: 08/26/1997
Inventor: Mudd
5765283, Method of making a flow controller
Issued on: 06/16/1998
Inventor: Mudd
5805442, Distributed interface architecture for programmable industrial control systems
Issued on: 09/08/1998
Inventor: Crater, et al.
5850850, Flow controller, parts of flow controller, and related method
Issued on: 12/22/1998
Inventor: Mudd
5911238, Thermal mass flowmeter and mass flow controller, flowmetering system and method
Issued on: 06/15/1999
Inventor: Bump, et al.
5944048, Method and apparatus for detecting and controlling mass flow
Issued on: 08/31/1999
Inventor: Bump, et al.
6061603, System for remotely accessing an industrial control system over a commercial communications network
Issued on: 05/09/2000
Inventor: Papadopoulos, et al.
6119047, Transmitter with software for determining when to initiate diagnostics
Issued on: 09/12/2000
Inventor: Eryurek, et al.
6151625, Internet web interface including programmable logic controller for controlling output devices based on status of input devices
Issued on: 11/21/2000
Inventor: Swales, et al.
6192281, Network accessible interface for a process control network
Issued on: 02/20/2001
Inventor: Brown, et al.
6216726, Wide range gas flow system with real time flow measurement and correction
Issued on: 04/17/2001
Inventor: Brown, et al.
6321272, Apparatus for controlling internetwork communications
Issued on: 11/20/2001
Inventor: Swales
6332348, Gas flow calibration of mass flow controllers
Issued on: 12/25/2001
Inventor: Yelverton, et al.
6333272, Gas distribution apparatus for semiconductor processing
Issued on: 12/25/2001
Inventor: McMillin, et al.
6343617, System and method of operation of a digital mass flow controller
Issued on: 02/05/2002
Inventor: Tinsley, et al.
6370448, Communication technique for field devices in industrial processes
Issued on: 04/09/2002
Inventor: Eryurek
6450190, Method of detecting abnormalities in flow rate in pressure-type flow controller
Issued on: 09/17/2002
Inventor: Ohmi, et al.
6539968, Fluid flow controller and method of operation
Issued on: 04/01/2003
Inventor: White, et al.
6619258, System for controllably disabling cylinders in an internal combustion engine
Issued on: 09/16/2003
Inventor: McKay ,   et al.
6640140PLC executive with integrated web server
Issued on: 10/28/2003
Inventor: Lindner ,   et al.

Foreign Patent References

  • 0110325 EP 06/01/1984
  • 0834723 EP 04/01/1998

International Classes

F17D 300
G05D 700

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