Fluid pressure seal arrangement
Rotatable seal assembly
Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment
Static pressure bearing
Manipulator for vacuum applications
Method and apparatus for continuous throughput in a vacuum environment Patent #: 4812101
ApplicationNo. 08953638 filed on 10/17/1997
US Classes:384/16, Annular277/431, Formed by pressurized sealing fluid introduced to form barrier277/913, SEAL FOR FLUID PRESSURE BELOW ATMOSPHERIC (E.G., VACUUM, ETC.)384/12Fluid bearing
ExaminersPrimary: Hannon, Thomas R.
Attorney, Agent or Firm
Foreign Patent References
International ClassesF16C 3372
AbstractA holder driving device has: a holder holding a substrate, a shaft supporting the holder, a driver for driving the shaft reciprocatingly and linearly in the direction along the shaft, a bearing unit having mechanical linear motion bearings for supporting the shaft thereon and having one or more stages of exhaust chambers surrounding the shaft; a vacuum pump for vacuum-pumping the exhaust chambers of the bearing unit; and a gas replacement mechanism for supplying dry gas, the humidity of which is lower than that of at least the surrounding atmosphere and the pressure of which is positive, from the outside of the bearing unit to at least the neighborhood of an atmosphere-side entrance portion of a gap between an end portion of the bearing unit one the side opposite to the vacuum vessel and the shaft passing the end portion, so as to replace the atmosphere near the entrance portion by the dry gas.