Synthesizing semiconductor process flow models

Patent 6772035 Issued on August 3, 2004. Estimated Expiration Date:

May 17, 2022. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

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Inventor

Mouli, Chandra V.

Application

No. 10150988 filed on 05/17/2002

US Classes:

700/121, Integrated circuit production or semiconductor fabrication700/29, Having model700/103, Constraints or rules703/6SIMULATING NONELECTRICAL DEVICE OR SYSTEM

Examiners

Primary: Gandhi, Jayprakash N.

Attorney, Agent or Firm

International Class

G06F 1900

Abstract

Systems and methods of modeling a best-guess semiconductor process flow for fabricating a desired semiconductor device are provided. The best-guess process flow is modeled using an inverse modeling technique. This technique reverse engineers a desired semiconductor device to synthesize a model of a fabrication process that is likely to produce the desired semiconductor device. First, a desired device having one or more desired characteristics is modeled. Then, various process and material parameters, constraints, and actual measured data are used to synthesize one or more unique software models that represent a process flow likely to fabricate the desired device. If more than one process flow is modeled, various parameters are modified iteratively until a unique process flow model is synthesized.

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