Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
Patent 6747775 Issued on June 8, 2004. Estimated Expiration Date: December 31, 2022. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
359/238, Light wave temporal modulation (e.g., frequency, amplitude, etc.)359/291, Shape or contour of light control surface altered359/295, Having multiple electrodes359/298, Light wave directional modulation (e.g., deflection or scanning is representative of the modulating signal)359/260, Etalon structure359/578, Electrically or mechanically variable (e.g., tunable, adjustable)359/359, Multilayer filter or multilayer reflector356/519, Having partially reflecting plates in series (e.g., Fabry-Perot type)356/454, Fabry-Perot type or Etalon Type356/450, BY LIGHT INTERFERENCE (E.G., INTERFEROMETER)356/506, Fabry-Perot type372/20, Tuning398/43MULTIPLEX
A detunable Fabry-Perot interferometer, and method of tuning a Fabry-Perot interferometer are provided. The Fabry-Perot interferometer includes a first mirror, a second mirror oriented with respect to the first mirror so as to define a Fabry-Perot cavity therebetween, and an actuator configured to adjust a resonant wavelength of the Fabry-Perot cavity by varying a gap between the first and second mirrors, wherein the actuator is configured to selectively maintain the first and second mirrors in a substantially non-parallel relationship while the resonant wavelength of the Fabry-Perot interferometer is varied. The detunable Fabry-Perot interferometer can be employed in a multiplexer of a telecommunications system, as provided.
Other References
Joost C. Lotters et al.; “Polydimethylisiloxane as an elastic material applied in a capacitive accelerometer”; (1996); J. Micromech. Microeng. 6 (1996) pp. 52-54.
P. Bley; “Polymers-an Excellent and Increasingly Used Material for Microsystems”; Sep. 1999; SPIE vol. 3876; pp. 172-184.
Thorbjorn Ebeforst et al.; “New small radius joints based on thermal shrinkage of polyimide in V-grooves for robust self-assembly 3D microstructures”; J. Micromech. Microeng. 8 (1998); pp. 188-194.
M Pedersent et al.; “A capacitive differential pressure sensor with polyimide diaphragm”; J. Micromech. Microeng. 7 (1997); pp. 250-252.
Frank Niklaus et al.; “Low-temperature full wafer adhesive bonding”; J. Micromech. Microeng. 11 (2001); pp. 100-107.
Kenji Suzuki et al.; “Insect-Model Based Microrobot with Elastic Hinges”; Journal of Microelectromechanical Systems, vol. 3, No. 1, Mar. 1994; pp. 4-9.
K. Minami et al.; “Fabrication of Distributed Electrostatic Micro Actuator (DEMA)”; Journal of Microelectromechanical Systems, vol. 2, No. 3, Sep. 1993; pp. 121-127.
Cheol-Hyun Han et al.; “Parylene-Diaphragm Piezoelectric Acoustic Transducers”; The Thirteenth Annual International Conference on Microelectromechanical Systems; (2000), pp. 148-152.
Krzysztof A R B Pietraszewski et al.; “Cryogenic servo-stabilised Fabry-Perot Interferometer for imaging at 2-2.5microns”; SPIE Proceedings, vol. 2814 (1996): pp. 139-146.
T R Hicks et al.; “The application of capacitance micrometry to the control of Fabry-Perot etalons”; J. Phys. E. Instrum., vol. 17, 1984, pp. 49-55.
P. Tayebati et al.; “Widely Tunable Fabry-Perot filter Using Ga(A1)As-AIOx Deformable Mirrors”; IEEE Photonics Technology Letters, vol. 10, No. 3, Mar. 1998; pp. 394-396.
P. Tayebati et al.; “Microelectromechanical tunable filters with 0.47nm linewidth and 70nm tuning range”; Electronics Letters; Jan. 8, 1998; vol. 34, No. 1; pp. 76-78.
M.C. Larson et al.; “Vertical Coupled-Cavity Microinterferometer on GaAs with Deformable-Membrane Top Mirror”; IEEE Photonics Technology Letters, vol. 7, No. 4, Apr. 1995; pp. 382-384.
K. Aratani et al.; “Process and Design Considerations for Surface Micromachined Beams for a Tunable Interferometer Array in Silicon”; Proc. IEEE Micro Electro Mechanical Systems, Ft. Lauderdal, FL, 1993, pp. 230-235.
MEM-TUNE Tunable Filter; Preliminary Data Sheet; May 2000.
OPM-1 Optical Performance Monitor; Preliminary Data Sheet; May 2000.
GTM-1 EDFA Gain-Tilt Monitor; Preliminary Data Sheet; May 2000.
J.H. Jerman et al.; “Miniature Fabry-Perot Interferometers Micromachined in Silicon for use in Optical Fiber WDM Systems”; Transducers '91, International Solid-State Conference on Sensors and Actuators, pp. 372-375 (1991) IEEE, pp. 472-475.
P. Tayebati; “Microelectromechanical tunable filter with stable haft symmetric cavity”; Electronics Letters-IEEE, 1998, p. 1967.
E. Ollier et al.; “Micro-Opto-Electro-Mechanical Systems: Recent developments and LeETI's acitivities”; SPIE; vol. 4075; pp. 12-21.
T. R. Hicks et al.; “The application of capacitance micrometry to the control of Fabry-Perot etalons”; J. Phys. E: Sci. Instrum., vol. 17, 1984; pp. 49-55.
December 31, 2022. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
