Micromachined, etalon-based optical fiber pressure sensor
March 22, 2021. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3853650 3893228 Electrostatically deformable thin silicon membranes Process for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layer Optical resonator single-mode fiber hydrophone Chemical etching of a semiconductive wafer by undercutting an etch stopped layer Pressure sensitive element Fabry-perot interferometer Optical micropressure transducer Optical pressure-sensing system using optical resonator cavity InventorsAssigneeApplicationNo. 09814526 filed on 03/22/2001US Classes:356/480, Resonant cavity250/227.17, Causing polarization change in fiber385/12OPTICAL WAVEGUIDE SENSORExaminersPrimary: Glick, Edward J.Assistant: Kiknadze, Irakli Attorney, Agent or FirmInternational ClassG01B 902AbstractAn optical fiber pressure sensor having a base layer 20 with an optical fiber hole, a fiber stop layer 28 and, optionally, an etch stop layer 24. The fiber stop layer optionally has a fiber stop hole 33 that is smaller than the optical fiber 22. A diaphragm cap layer 32 is bonded to the fiber stop layer 28. The diaphragm cap layer 32 has a diaphragm 34 spaced apart from the optical fiber. The optical fiber and diaphragm form an Etalon that changes cavity length with applied pressure. Optionally, the device is made almost entirely of silicon, and so has reduced mechanical stress problems caused by thermal expansion mismatches. This allows the present sensor to be used in high temperature environments such as internal combustion engines. | |
