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Microfluidic actuation method and apparatus

Patent 6669454 Issued on December 30, 2003. Estimated Expiration Date: Icon_subject June 5, 2021. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

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Inventors

Assignee

Application

No. 09/874944 filed on 06/05/2001

US Classes:

417/410.2, Having piezoelectric driven blade310/321, Combined with resonant structure417/436TRANSVERSELY MOVABLE IMPELLING MEMBER (E.G., PADDLE)

Examiners

Primary: Koczo, Michael

Attorney, Agent or Firm

International Classes

F04F 7/00 (20060101)
F15C 3/00 (20060101)
F15C 3/04 (20060101)
F04B 19/00 (20060101)
F04B 17/00 (20060101)
B81B 3/00 (20060101)

Abstract

Control of fluid motion within microcavities is carried out using microstructures in the cavities having cantilever elements that are coupled to a substrate to receive vibrations therefrom. The cantilever elements can be excited into resonance at one or more resonant frequencies. By selection of the shape of the cantilever elements, their position in the microcavity, the spacing of the cantilever elements from the walls of the cavity, and the frequency at which the cantilever elements are excited, the direction of pumping of fluid through the cavity can be controlled, blocked or diverted.

Other References

  • Ville Kaajakari, et al., "Ultrasonically Driven Surface Micromachined Motor," Proceedings of the 13th Annual International Conference on Micro Electro Mechanical Systems, Miyazaki, Japan, Jan. 23-27, 2000, pp. 40-45
  • Amil Lal, Micromachined Silicon Ultrasonic Longitudinal Mode Actuators: Theory and Applications to Surgery, Pumping, and Atomization, Ph.D. Thesis, University of California, Berkeley, 1996, pp. 137-177
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