Patent ReferencesFlexible, oscillating blade liquid pump Piezoelectrically driving device Heat exchanger having piezoelectric fan means Method and apparatus for using ultrasonic energy for moving microminiature elements Microdynamic release structure Ultrasonic step motor Ultrasonic motor and electronic apparatus provided with an ultrasonic motor Microstructure, process for manufacturing thereof and devices incorporating the same Method for the manufacture of an electrodisplacive actuator array Method of making a piezoelectric/electrostrictive film element with a diaphragm having at least one stress releasing end section Patent #: 5940947 InventorsAssigneeApplicationNo. 09/874944 filed on 06/05/2001US Classes:417/410.2, Having piezoelectric driven blade310/321, Combined with resonant structure417/436TRANSVERSELY MOVABLE IMPELLING MEMBER (E.G., PADDLE)ExaminersPrimary: Koczo, MichaelAttorney, Agent or FirmInternational ClassesF04F 7/00 (20060101)F15C 3/00 (20060101) F15C 3/04 (20060101) F04B 19/00 (20060101) F04B 17/00 (20060101) B81B 3/00 (20060101) AbstractControl of fluid motion within microcavities is carried out using microstructures in the cavities having cantilever elements that are coupled to a substrate to receive vibrations therefrom. The cantilever elements can be excited into resonance at one or more resonant frequencies. By selection of the shape of the cantilever elements, their position in the microcavity, the spacing of the cantilever elements from the walls of the cavity, and the frequency at which the cantilever elements are excited, the direction of pumping of fluid through the cavity can be controlled, blocked or diverted.Other References
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