Patent ReferencesMethod and means for improved heat removal in compact semiconductor integrated circuits Cross-hatch flow distribution and applications thereof Method for providing a thermal transfer device for the removal of heat from packaged elements Apparatus for cooling semiconductor chips in multichip modules Micropost waste heat removal system Temperature control structure Electronic device assembly and a method of connecting electronic devices constituting the same Patent #: 6576499 InventorApplicationNo. 10/241132 filed on 09/11/2002US Classes:257/714, Liquid coolant257/712, With provision for cooling the housing or its contents257/E23.098By flowing liquids (EPO)ExaminersPrimary: Clark, Sheila V.Attorney, Agent or FirmInternational ClassesH01L 23/34 (20060101)H01L 23/473 (20060101) Foreign Application Priority Data2002-02-08 KRAbstractProvided is a water cooling type cooling block for a, semiconductor chip which can increase heat transfer efficiency by inducing turbulent flow even if a coolant flows at low speed. The cooling block includes a heat transfer plate contacting the semiconductor chip, a case connected to the heat transfer plate to enclose the heat transfer plate so as to accommodate a coolant for cooling heat from the heat transfer plate and having a coolant inlet port at its first end and a coolant outlet port at its second end so as to allow movement of the coolant, and a sealing means hermetically sealing the heat transfer plate and the case. The heat transfer plate is formed of a metal having high heat conductivity, and has a plurality of ribs entirely shaped of a flat plate on the surface opposite to a surface contacting the semiconductor chip for increasing a heat transfer surface to increase a heat transfer area, to induce turbulent flow of a coolant and to prevent a heat transfer coefficient from decreasing even if the flow rate is reduced. Therefore, a heat transfer area and heat transfer efficiency can be improved by increasing the circulation speed of a coolant. Also, heat resistance can be reduced by inducing turbulent flow of a coolant, which is advantageous for heat transfer. Further, since a user can observe the circulation state of a coolant or the internal state of the cooling block by user's naked eye, the cooling block can be replaced with new one or a coolant can be replaced before cooling efficiency is deteriorated. Further, the temperature of the semiconductor chip can be accurately measured by providing a sensor surrounded by an insulating material. | |