Defect detection with enhanced dynamic range
January 15, 2022. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesExposure control system for an electronic imaging camera having increased dynamic range Apparatus with four light detectors for checking surface of mask with pellicle Method and apparatus for detecting foreign particle Defect inspecting apparatus using multiple color light to detect defects Optical thickness profiler using synthetic wavelengths Optical measurement device with enhanced sensitivity Dark field imaging defect inspection system for repetitive pattern integrated circuits Adaptive spatial filter for surface inspection Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier transform components Two-phase optical inspection method and apparatus for defect detection InventorsApplicationNo. 10/050889 filed on 01/15/2002US Classes:356/237.3, Detection of object or particle on surface356/237.5On patterned or topographical surface (e.g., wafer, mask, circuit board)ExaminersPrimary: Font, Frank G.Assistant: Nguyen, Son T. Attorney, Agent or FirmInternational ClassesG01N 21/95 (20060101)G01N 21/88 (20060101) AbstractApparatus for optical inspection includes a source of optical radiation, which is adapted to scan a spot of the radiation over a sample, whereby the radiation is scattered from the spot. A detection system includes at least first and second detectors optically coupled to receive the scattered radiation and to generate respective first and second outputs responsive thereto, the detection system being configured so that the first detector detects variations in the scattered radiation with a greater sensitivity than the second detector, while the second detector saturates at a higher intensity of the scattered radiation than does the first detector. A signal processor is coupled to receive the first and second outputs and to determine, responsive to the outputs, locations of defects on the sample.Other References
Field of SearchINSPECTION OF FLAWS OR IMPURITIESTextile inspection Elongated textile product (e.g., thread, yarn, etc.) Detection of foreign material (e.g., trash, splinters, contaminants, etc.) Transparent or translucent material Optical element (e.g., contact lens, prism, filter, lens, etc.) Patterned surface Containers (e.g., bottles) Detection of foreign matter on or in container Of container contents Surface condition Detection of an object or particle on surface Containers or enclosures (e.g., packages, cans, etc.) Bore inspection (e.g., borescopes, intrascope, etc.) Firearm bore inspection With adjustable head Flexible Specific construction of distal end Having guiding means Surface condition Detection of object or particle on surface On patterned or topographical surface (e.g., wafer, mask, circuit board) On patterned or topographical surface (e.g., wafer, mask, circuit board) Having predetermined light transmission regions (e.g., holes, aperture, multiple material articles) BY POLARIZED LIGHT EXAMINATION Integrating spheres | |
