Radio frequency identification device
December 10, 2021. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesCarrier for cleaning and etching wafers Non-contacting code recognition system for code carriers on production line workpieces Method and apparatus for monitoring the location of wafer disks Processing systems with intelligent article tracking Method and system for storing/removing and distributing articles of manufacture Electronic inventory label and security apparatus ID recognizing system in semiconductor manufacturing system Security structure with electronic smart card access thereto with transmission of power and data between the smart card and the smart card reader performed capacitively or inductively Probe card identification for computer aided manufacturing Data collection system InventorsAssigneeApplicationNo. 10/007106 filed on 12/10/2001US Classes:235/375, SYSTEMS CONTROLLED BY DATA BEARING RECORDS235/380Credit or identification card systemsExaminersPrimary: Tremblay, MarkAttorney, Agent or FirmInternational ClassG07F 7/10 (20060101)AbstractAn identification system for tracking wafer carriers within a manufacturing facility. The system uses smart card technology in which an identification card is placed on each wafer carrier. The smart cards have memory for storing information about the wafer carrier. Power is transmitted to the card along with data so that the smart card does not require a separate power source. The devices for communicating with the smart cards can be stationary or they can be portable hand-carried devices. A network connects the readers to a central database. | |
