Patent References 3069654 Method and system for surface contouring Aromatic odorant emitting device Detection of three-dimensional information using a projected point or line of light Optical profiler using improved phase shifting interferometry Method and apparatus for surface profilometry Triangulation data integrity Anagraphic stand 3D imaging of a substrate using perpendicular scanning directions Method and system for increasing the effective dynamic range of a photosensor InventorsApplicationNo. 350051 filed on 07/08/1999US Classes:250/205, Controlling light source intensity250/559.23, With triangulation356/601SHAPE OR SURFACE CONFIGURATIONExaminersPrimary: Le, Que T.Assistant: Luu, An T. Attorney, Agent or FirmForeign Patent References
International ClassG01J 001/32AbstractManufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a light source for propagating light to the device and an image detector that receives light from the device. Also included is a light sensor assembly for receiving a portion of the light from the light source. The light sensor assembly produces an output signal responsive to the intensity of the light received at the light sensor assembly. A controller controls the amount of light received by the image detector to a desired intensity range in response to the output from the light sensor. The image detector may include an array of imaging pixels. The imaging system may also include a memory device which stores correction values for at least one of the pixels in the array of imaging pixels. To minimize or control thermal drift of signals output from an array of imaging pixels, the machine-vision system may also include a cooling element attached to the imaging device. The light source for propagating light to the device may be strobed. The image detector that receives light from the device remains in a fixed position with respect to the strobed light source. A translation element moves the strobed light source and image detector with respect to the device. The strobed light may be alternated between a first and second level.Other References
Field of SearchControlling light source intensityAdjusting optical system to balance brightness in plural paths Photocell controls its own optical systems With comparison to reference or standard With alignment detection With triangulation Means for moving optical system Profile With triangulation Transversal measurement (e.g., width, diameter, cross-sectional area) Determining range from detector With transversal scan Radiant energy responsive load device Load device irradiating the radiant energy responsive device Plural load devices Selective energization of the load devices Selective electric switch controlled by the radiant energy responsive device Plural radiant energy responsive devices Radiant energy control of an electric discharge device in the supply circuit of the load device Discharge control discharge device load controlled by the radiant energy responsive device Radiant energy controlled regulation of the current supply for the load device Electric switch controlled by the radiant energy responsive device Contour or profile MOTION STOPPING (E.G., STROBOSCOPES) SHAPE OR SURFACE CONFIGURATION Triangulation Projection of structured light pattern Pattern is series of non-intersecting lines Moire Line of light projected Scan Scan Intensity, brightness, contrast, or shading correction Reflector type modifier | |