Method of forming a nano-supported sponge catalyst on a substrate for nanotube growth
August 29, 2021. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesElectro optic display device with porous sub-layer and method Field emission device having an amorphous multi-layered structure Electron emissive film and method Controlled synthesis and metal-filling of aligned carbon nanotubes Method for producing narrow wires comprising titanium oxide, and narrow wires and structures produced by the same method Nanostructure, electron emitting device, carbon nanotube device, and method of producing the same Nanoscale patterning for the formation of extensive wires In-situ nano-interconnected circuit devices and method for making the same Method of producing carbon nanotubes Mass synthesis method of high purity carbon nanotubes vertically aligned over large-size substrate using thermal chemical vapor deposition InventorsAssigneeApplicationNo. 942456 filed on 08/29/2001US Classes:216/56, ETCHING TO PRODUCE POROUS OR PERFORATED ARTICLE216/100, Substrate contains elemental metal, alloy thereof, or metal compound423/447.3From gaseous reactantsExaminersPrimary: Kunemund, RobertAssistant: Mackey, Terrence M. Attorney, Agent or FirmForeign Patent References
International ClassC23C 016/26AbstractA method of forming a nano-supported sponge catalyst (10) on a substrate (12) is comprised of depositing an active catalytic metallic element (16) on the substrate (12) and depositing a structural metallic element (18) with the active catalytic metallic element (16) to form a mixed metal alloy layer (14). The method is further comprised of etching the mixed metal alloy layer (14) with an etchant to oxidize the active catalytic metallic element (16) and the structural metallic element (18) and to remove at least a portion of the structural metallic element (18) from a first sub-layer of the mixed metal alloy layer (14). The first sub-layer of the mixed metal alloy layer (14) is porous and comprised of nano-particles of the active catalytic metallic element (16) that are supported by a metal oxide structure derived from the structural metallic element (18). |
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