2403692
2975307
3304446
3381623
3641373
3769531
3803424
3921456
Piezoelectric-type electroacoustic transducer
Patent #: 3947644
Issued on: 03/30/1976
Inventor: Uchikawa
Pump for pumping liquid in a pulse-free flow
Patent #: 4115036
Issued on: 09/19/1978
Inventor: Paterson
More ...
Square and rectangular electroacoustic bender bar transducer
Patent #: 4140936
Issued on: 02/20/1979
Inventor: Bullock
Multiple sensing device and sensing devices therefor
Patent #: 4197737
Issued on: 04/15/1980
Inventor: Pittman
Ink jet apparatus and method
Patent #: 4453169
Issued on: 06/05/1984
Inventor: Martner
Flow sensor
Patent #: 4478076
Issued on: 10/23/1984
Inventor: Bohrer
Flow sensor
Patent #: 4478077
Issued on: 10/23/1984
Inventor: Bohrer , et al.
Method and device for fluid transfer
Patent #: 4498850
Issued on: 02/12/1985
Inventor: Perlov , et al.
Flow sensor
Patent #: 4501144
Issued on: 02/26/1985
Inventor: Higashi , et al.
Recorder operating with liquid drops and comprising elongates piezoelectric transducers rigidly connected at both ends with a jet orifice plate
Patent #: 4539575
Issued on: 09/03/1985
Inventor: Nilsson
Thermal diffusion fluid flow sensor
Patent #: 4576050
Issued on: 03/18/1986
Inventor: Lambert
Semiconductor device
Patent #: 4651564
Issued on: 03/24/1987
Inventor: Johnson , et al.
Electromechanical film and procedure for manufacturing same
Patent #: 4654546
Issued on: 03/31/1987
Inventor: Kirjavainen
Silicon valve
Patent #: 4756508
Issued on: 07/12/1988
Inventor: Giachino , et al.
Air sampling device
Patent #: 4786472
Issued on: 11/22/1988
Inventor: McConnell , et al.
Valve element and process of producing the same
Patent #: 4821999
Issued on: 04/18/1989
Inventor: Ohtaka
Micro miniature implantable pump
Patent #: 4911616
Issued on: 03/27/1990
Inventor: Laumann, Jr.
Piezoelectric micropump with microvalves
Patent #: 4938742
Issued on: 07/03/1990
Inventor: Smits
Piezo-electric vibrator pump
Patent #: 4939405
Issued on: 07/03/1990
Inventor: Okuyama, et al.
Valve arrangement of microstructured components
Patent #: 5065978
Issued on: 11/19/1991
Inventor: Albarda, et al.
Semiconductor microactuator
Patent #: 5069419
Issued on: 12/03/1991
Inventor: Jerman
Cascade compressor
Patent #: 5078581
Issued on: 01/07/1992
Inventor: Blum, et al.
Electronic microvalve apparatus and fabrication
Patent #: 5082242
Issued on: 01/21/1992
Inventor: Bonne, et al.
Micropump having a constant output
Patent #: 5085562
Issued on: 02/04/1992
Inventor: van Lintel
Microfabricated pump
Patent #: 5096388
Issued on: 03/17/1992
Inventor: Weinberg
Pump apparatus
Patent #: 5129794
Issued on: 07/14/1992
Inventor: Beatty
Piezoelectric device and related converting devices
Patent #: 5148074
Issued on: 09/15/1992
Inventor: Fujita, et al.
Two-valve thin plate micropump
Patent #: 5171132
Issued on: 12/15/1992
Inventor: Miyazaki, et al.
Microstructure gas valve control
Patent #: 5176358
Issued on: 01/05/1993
Inventor: Bonne, et al.
Microminiaturized electrostatic pump
Patent #: 5180288
Issued on: 01/19/1993
Inventor: Richter, et al.
Electronic microvalve apparatus and fabrication
Patent #: 5180623
Issued on: 01/19/1993
Inventor: Ohnstein
Piezoelectric pump
Patent #: 5192197
Issued on: 03/09/1993
Inventor: Culp
Microelectromechanical transducer and fabrication method
Patent #: 5206557
Issued on: 04/27/1993
Inventor: Bobbio
Gas sampling system and method
Patent #: 5212993
Issued on: 05/25/1993
Inventor: Mayer
Micropump with improved priming
Patent #: 5219278
Issued on: 06/15/1993
Inventor: van Lintel
Two valve micropump with improved outlet
Patent #: 5224843
Issued on: 07/06/1993
Inventor: van Lintel
Fabrication of an electronic microvalve apparatus
Patent #: 5244537
Issued on: 09/14/1993
Inventor: Ohnstein
Micromechanical actuator
Patent #: 5322258
Issued on: 06/21/1994
Inventor: Bosch, et al.
Microstructure gas valve control
Patent #: 5323999
Issued on: 06/28/1994
Inventor: Bonne, et al.
Microstructure gas valve control forming method
Patent #: 5441597
Issued on: 08/15/1995
Inventor: Bonne, et al.
Miniature actuating device
Patent #: 5452878
Issued on: 09/26/1995
Inventor: Gravesen, et al.
Pneumatically driven micro-pump
Patent #: 5499909
Issued on: 03/19/1996
Inventor: Yamada, et al.
Electrostatic actuator
Patent #: 5541465
Issued on: 07/30/1996
Inventor: Higuchi, et al.
Electrostatic actuator
Patent #: 5552654
Issued on: 09/03/1996
Inventor: Konno, et al.
Sensor arrays for detecting analytes in fluids
Patent #: 5571401
Issued on: 11/05/1996
Inventor: Lewis, et al.
Elastomeric micro electro mechanical systems
Patent #: 5642015
Issued on: 06/24/1997
Inventor: Whitehead, et al.
Hardware mounting rail
Patent #: 5683159
Issued on: 11/04/1997
Inventor: Johnson
Micromembrane pump
Patent #: 5725363
Issued on: 03/10/1998
Inventor: Bustgens, et al.
Micropump
Patent #: 5759014
Issued on: 06/02/1998
Inventor: Van Lintel
Piezoelectric micropump having actuation electrodes and stopper members
Patent #: 5759015
Issued on: 06/02/1998
Inventor: Van Lintel, et al.
Electrostatically actuated mesopump having a plurality of elementary cells
Patent #: 5836750
Issued on: 11/17/1998
Inventor: Cabuz
Partitioned microelectronic device array
Patent #: 5863708
Issued on: 01/26/1999
Inventor: Zanzucchi, et al.
Buckled actuator with enhanced restoring force
Patent #: 5901939
Issued on: 05/11/1999
Inventor: Cabuz, et al.
Sensors for detecting analytes in fluids
Patent #: 5911872
Issued on: 06/15/1999
Inventor: Lewis, et al.
Fluid flow module
Patent #: 6073482
Issued on: 06/13/2000
Inventor: Moles
Low cost, high pumping rate electrostatically actuated mesopump
Patent #: 6106245
Issued on: 08/22/2000
Inventor: Cabuz
Dual diaphragm, single chamber mesopump
Patent #: 6179586
Issued on: 01/30/2001
Inventor: Herb, et al.
Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode
Patent #: 6184607
Issued on: 02/06/2001
Inventor: Cabuz, et al.
Semiconductor integrated circuit testing apparatus with reduced installation area
Patent #: 6184697
Issued on: 02/06/2001
Inventor: Suga
Integrated multi-element lubrication sensor and lubricant health assessment
Patent #: 6196057
Issued on: 03/06/2001
Inventor: Discenzo
Electrostatic/pneumatic actuators for active surfaces Patent #: 6215221
Issued on: 04/10/2001
Inventor: Cabuz, et al.