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Superfine electronic device and method for making same

Patent 6525336 Issued on February 25, 2003. Estimated Expiration Date: Icon_subject February 25, 2020. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Inventors

Assignee

Application

No. 463761 filed on 06/05/1995

US Classes:

257/14, Quantum well257/E49.003Quantum devices, e.g., quantum interference devices, metal single electron transistor (EPO)

Examiners

Primary: Jackson, Jerome

Attorney, Agent or Firm

Foreign Patent References

  • A-427443 EP. 10/20/1990

International Class

H01L 029/06

Foreign Application Priority Data

1991-12-24 JP

Abstract

A superfine electronic device is disclosed, which is constructed by atomic fine lines having a structure in which a plurality of atoms are arranged on one or a plurality of straight lines, in a ring shape or on curves with a size of atomic level, and which includes elements for doping electrons and holes. Using these atomic fine lines, it is possible to integrate semiconductor elements utilizing pn junctions at an atomic level with a high density. A groove having a sufficiently small size is formed in an insulating film disposed on a substrate. Then, atoms or molecules are supplied on the substrate and in the groove, which and are heated to a temperature sufficiently high for moving the atoms or molecules during or after the supply thereof to form a quantum fine line at edge portions of the groove.

Other References

  • Nature, vol. 344, No. 6266, Apr. 5, 1990, Eigler et al. "Positioning Single Atoms with a Scanning Tunnelling Microscope", pp. 524-526
  • Elektronik, vol. 40, No. 21, Oct. 15, 1991, "Einzelnes Atom als elektrischer Schalter
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