U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Objective lens

Patent 6507442 Issued on January 14, 2003. Estimated Expiration Date: Icon_subject February 27, 2021. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Projection optical system and exposure apparatus provided therewith Patent #: 5831770
Issued on: 11/03/1998
Inventor: Matsuzawa, et al.

Inventors

Assignee

Application

No. 793566 filed on 02/27/2001

US Classes:

359/656, Microscope objective359/657, Having seven components359/658, Having six components359/740Between lens components

Examiners

Primary: Epps, Georgia
Assistant: Thompson, Timothy

Attorney, Agent or Firm

Foreign Patent References

  • 5-72482 JP. 03/13/1993
  • 6-242381 JP. 09/13/1994
  • 9-243923 JP. 09/13/1997
  • 10-104510 JP. 04/13/1998
  • 10-221597 JP. 08/13/1998
  • 11-167067 JP. 06/13/1999
  • 11-249025 JP. 09/13/1999

International Classes

G02B 021/02
G02B 009/00

Foreign Application Priority Data

2000-02-29 JP

Abstract

An objective lens includes a first lens unit constructed with a plurality of single lenses, having a negative power as a whole, and a second lens unit constructed with a plurality of single lenses, arranged on the object side of the first lens unit. Each of the first and second lens units is provided with air spaces between positive and negative lenses of different media and has at least one pair of lenses designed to satisfy all the following conditions when the parfocal distance of the objective lens is denoted by L (mm), an air apace by d (mm), the radius of curvature of a lens surface with a positive power opposite to the air space by Rp, and the radius of curvature of a lens surface with a negative power opposite to the air space by Rn, and in addition to the pair of lenses, the second lens unit has at least one single positive biconvex lens and at least one single positive meniscus lens, and thereby it becomes possible to correct chromatic aberration and to favorably obtain resolution corresponding to a high numerical aperture and a wavelength used:0.01<dd/L<0.010.88<Rp/Rn<1.14.

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