Wear coating applied to an atomic force probe tip
September 13, 2020. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod for making a fiber probe device having multiple diameters Method for producing tips for atomic force microscopes Nanometer scale data storage device and associated positioning system Probe for atomic force microscope and atomic force microscope Nanometer scale data storage device and associated positioning system 6268608 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements Method of fabricating probe force atomic force microscope Patent #: 6358426 InventorsAssigneeApplicationNo. 660654 filed on 09/13/2000US Classes:250/306, INSPECTION OF SOLIDS OR LIQUIDS BY CHARGED PARTICLES73/105RoughnessExaminersPrimary: Berman, Jack I.Assistant: Smith, II, Johnnie L Attorney, Agent or FirmInternational ClassesG01N 023/00G21K 007/00 G01B 005/28 AbstractA probe tip manufactured from a conically shaped quartz tip etched to a fine apex. The quartz tip is coated with about 1 μm of a hard material such as silicon nitride. A probe tip having dimensions of about 100 nm×1 μm is then machined from the hard material adjacent to the apex of the quartz tip along the axis of the quartz tip. The machining is preferably performed by focused ion beam milling. | |
