Wafer alignment station
Method and apparatus for transferring wafers between cassettes and a boat
Wafer alignment and transport mechanism
Method for transporting silicon wafers
Transport apparatus for semiconductor wafers
Apparatus for transferring a wafer
Wafer holder with spindle assembly and wafer holder actuator
Substrate processing apparatus
Robot arm with specimen edge gripping end effector
ApplicationNo. 609342 filed on 07/05/2000
US Classes:414/757, Article frictionally engaged and rotated by relatively movable means (e.g., disc, endless belt, etc.)414/783, Orienter has article gripping means414/936, Including wafer orienting means414/941Includes means for gripping wafer
ExaminersPrimary: Krizek, Janice L.
Attorney, Agent or Firm
Foreign Patent References
International ClassB65G 049/07
AbstractAn apparatus for holding and orienting a wafer having an alignment feature, and including a movable robot arm; and an end effector attached to an end of the robot arm, the end effector including a gripping mechanism which during operation both holds the wafer and rotates it about an axis that is perpendicular to the plane of the wafer and a sensing element for detecting the alignment feature on the wafer as the gripping mechanism rotates the wafer past the sensing element.