Edge-gripping pre-aligner
July 5, 2020. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesWafer alignment station Transport mechanism Method and apparatus for transferring wafers between cassettes and a boat Wafer alignment and transport mechanism Method for transporting silicon wafers Transport apparatus for semiconductor wafers Apparatus for transferring a wafer Wafer holder with spindle assembly and wafer holder actuator Substrate processing apparatus Robot arm with specimen edge gripping end effector InventorAssigneeApplicationNo. 609342 filed on 07/05/2000US Classes:414/757, Article frictionally engaged and rotated by relatively movable means (e.g., disc, endless belt, etc.)414/783, Orienter has article gripping means414/936, Including wafer orienting means414/941Includes means for gripping waferExaminersPrimary: Krizek, Janice L.Attorney, Agent or FirmForeign Patent References
International ClassB65G 049/07AbstractAn apparatus for holding and orienting a wafer having an alignment feature, and including a movable robot arm; and an end effector attached to an end of the robot arm, the end effector including a gripping mechanism which during operation both holds the wafer and rotates it about an axis that is perpendicular to the plane of the wafer and a sensing element for detecting the alignment feature on the wafer as the gripping mechanism rotates the wafer past the sensing element.Other References
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