Semiconductor process system, its control method, computer readable memory, and device manufacturing method
September 21, 2020. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesAutomated integrated circuit manufacturing system Processing systems with intelligent article tracking Computer-integrated manufacturing system and method Method and apparatus for carrying a variety of products Dispatch and conveyer control system for a production control system of a semiconductor substrate Method of producing semiconductor wafer Controller of conveyance system Wafer conveyor system Wafer producing apparatus System for processing a plurality of objects contained in a plurality of cassettes InventorAssigneeApplicationNo. 666311 filed on 09/21/2000US Classes:700/121, Integrated circuit production or semiconductor fabrication700/97Design or planningExaminersPrimary: Grant, WilliamAssistant: Cabrera, Zoila Attorney, Agent or FirmInternational ClassG06F 019/00Foreign Application Priority Data1997-06-13 JPAbstractIn a semiconductor process system having a semiconductor process apparatus for performing various jobs to manufacture a semiconductor device, a material convey unit for conveying materials used in the jobs to the semiconductor process apparatus, and a host computer for monitoring the operation state of the semiconductor process apparatus, instructing the material convey unit to convey a material used in a required job, and instructing the semiconductor process apparatus to execute the job, the host computer makes a job reservation that informs the semiconductor process apparatus of the job to be executed simultaneously with the convey instruction of the material used in the required job, and the semiconductor process apparatus confirms in accordance with the job reservation if job data required for the reserved job is present in the apparatus, and takes a predetermined measure such as requesting a job data transfer means to transfer job data required, or outputting a predetermined warning, if the job data is not present.Other References
Field of SearchIntegrated circuit production or semiconductor fabricationHaving particular work transport control between manufacturing stations Material requirement Bill of material Resource allocation Job scheduling Job release determination Product tracking (e.g., having product or carrier identification) Having identification controlled manufacturing operation Design or planning Priority ordering | |
