U.S. patents available from 1976 to present.
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Atomic focusers in electron microscopy

Patent 6448556 Issued on September 10, 2002. Estimated Expiration Date: Icon_subject June 14, 2019. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Electron microscope
Patent #: 5304801
Issued on: 04/19/1994
Inventor: Arai

Instrument and method for 3-dimensional atomic arrangement observation Patent #: 5475218
Issued on: 12/12/1995
Inventor: Kakibayashi, et al.

Inventors

Assignee

Application

No. 645999 filed on 06/14/1999

US Classes:

250/311, Electron microscope type250/396RWITH CHARGED PARTICLE BEAM DEFLECTION OR FOCUSSING

Examiners

Primary: Berman, Jack I.

Attorney, Agent or Firm

Foreign Patent References

  • WO-98/38669 WO. 09/12/1998

International Classes

H01J 037/12
H01J 037/28

Abstract

In electron microscopy, resolution is improved by using an atom or atom-array focuser, with the atom or atom array serving as an electrostatic lens at a focal plane of an electron beam probe having a beam size less than about 0.2 nm at the focal plane. An electrostatic lens can be included in ultra-high resolution microscopes wherein (i) in a linear atom array, the atoms are in alignment with the electron path, (ii) the distance between a sample and the electrostatic lens is adjustable, (iii) a two-dimensional focuser is used, (iv) a sample is at Fourier image distance from a two-dimensionally periodic focuser, (v) a two-dimensional detector or detector array is used, and/or (vi) the electron beam is scanned at the focal plane.

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