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Process for producing a low viscosity silicone resin
Patent #: 4026868
Issued on: 05/31/1977
Inventor: Merrill
Laddery lower alkylpolysilsesquioxane having heat-resistant thin film-formability and process for preparing same
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Issued on: 08/16/1983
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Method of hydrolyzing chlorosilanes
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Issued on: 09/02/1986
Inventor: Hajjar
Sodium free silicone resin coating compositions
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Issued on: 11/25/1986
Inventor: Anthony
Solvent-soluble organopolysilsesquioxane, process for producing the same, and semi-conductor using the same
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Issued on: 12/02/1986
Inventor: Nozue , et al.
Preparation of lower alkyl polysilsesquioxane and formation of insulating layer of silylated polymer on electronic circuit board
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Issued on: 06/02/1987
Inventor: Fukuyama , et al.
Liquid composition for forming a coating film of organopolysiloxane and method for the preparation thereof
Patent #: 4694040
Issued on: 09/15/1987
Inventor: Hashimoto , et al.
Method for a plasma-treated polysiloxane coating
Patent #: 4723978
Issued on: 02/09/1988
Inventor: Clodgo , et al.
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Multilayer ceramics from silicate esters
Patent #: 4749631
Issued on: 06/07/1988
Inventor: Haluska , et al.
Multilayer ceramic coatings from metal oxides for protection of electronic devices
Patent #: 4753855
Issued on: 06/28/1988
Inventor: Haluska , et al.
Multilayer ceramics from hydrogen silsesquioxane
Patent #: 4756977
Issued on: 07/12/1988
Inventor: Haluska , et al.
Coating composition containing hydrogen silsesquioxane resin and other metal oxide precursors
Patent #: 4808653
Issued on: 02/28/1989
Inventor: Haluska , et al.
Platinum and rhodium catalysis of low temperature formation multilayer ceramics
Patent #: 4822697
Issued on: 04/18/1989
Inventor: Haluska , et al.
Multilayer ceramics coatings from the ceramification of hydrogen silsequioxane resin in the presence of ammonia
Patent #: 4847162
Issued on: 07/11/1989
Inventor: Haluska , et al.
Multilayer ceramic coatings from metal oxides and hydrogen silsesquioxane resin ceramified in ammonia
Patent #: 4849296
Issued on: 07/18/1989
Inventor: Haluska , et al.
Surface treated polymethylsilsesquioxane powder
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Issued on: 01/23/1990
Inventor: Saitoh, et al.
Compositions of platinum and rhodium catalyst in combination with hydrogen silsesquioxane resin
Patent #: 4898907
Issued on: 02/06/1990
Inventor: Haluska, et al.
Platinum or rhodium catalyzed multilayer ceramic coatings from hydrogen silsesquioxane resin and metal oxides
Patent #: 4911992
Issued on: 03/27/1990
Inventor: Haluska, et al.
Method of forming ceramic coatings and resulting articles
Patent #: 4973526
Issued on: 11/27/1990
Inventor: Haluska
Metastable silane hydrolyzates and process for their preparation
Patent #: 4999397
Issued on: 03/12/1991
Inventor: Weiss, et al.
Platinum or rhodium catalyzed multilayer ceramic coatings from hydrogen silsesquioxane resin and metal oxides
Patent #: 5008320
Issued on: 04/16/1991
Inventor: Haluska, et al.
Process for the synthesis of soluble, condensed hydridosilicon resins containing low levels of silanol
Patent #: 5010159
Issued on: 04/23/1991
Inventor: Bank, et al.
Metastable silane hydrolyzates
Patent #: 5045592
Issued on: 09/03/1991
Inventor: Weiss, et al.
Organooligosilsesquioxanes
Patent #: 5047492
Issued on: 09/10/1991
Inventor: Weidner, et al.
Rapid thermal process for obtaining silica coatings
Patent #: 5059448
Issued on: 10/22/1991
Inventor: Chandra, et al.
Hydrogen silsesquioxane resin fractions and their use as coating materials
Patent #: 5063267
Issued on: 11/05/1991
Inventor: Hanneman, et al.
Process for forming a coating on a substrate using a silsesquioxane resin
Patent #: 5085893
Issued on: 02/04/1992
Inventor: Weiss, et al.
Perhydrosiloxane copolymers and their use as coating materials
Patent #: 5091162
Issued on: 02/25/1992
Inventor: Frye, et al.
Use of metal salts in the synthesis of oligomeric hydrogensilsesquioxanes via hydrolysis/condensation reactions
Patent #: 5106604
Issued on: 04/21/1992
Inventor: Agaskar
Amine catalysts for the low temperature conversion of silica precursors to silica
Patent #: 5116637
Issued on: 05/26/1992
Inventor: Baney, et al.
Use of hydrogen silsesquioxane resin fractions as coating materials
Patent #: 5118530
Issued on: 06/02/1992
Inventor: Hanneman, et al.
Process for coating a substrate with silica
Patent #: 5145723
Issued on: 09/08/1992
Inventor: Ballance, et al.
Method of depositing a coating containing silicon and oxygen
Patent #: 5165955
Issued on: 11/24/1992
Inventor: Gentle
Single and multilayer coatings containing aluminum nitride
Patent #: 5183684
Issued on: 02/02/1993
Inventor: Carpenter
Process for forming siloxane bonds
Patent #: 5210168
Issued on: 05/11/1993
Inventor: Bergstrom, et al.
Photodelineable coatings from hydrogen silsesquioxane resin
Patent #: 5238787
Issued on: 08/24/1993
Inventor: Haluska, et al.
Process of preventing visual access to a semiconductor device by applying an opaque ceramic coating to integrated circuit devices
Patent #: 5258334
Issued on: 11/02/1993
Inventor: Lantz, II
Low temperature process for converting silica precursor coatings to ceramic silica coatings by exposure to ammonium hydroxide or an environment to which water vapor and ammonia vapor have been added
Patent #: 5262201
Issued on: 11/16/1993
Inventor: Chandra, et al.
Vaporized hydrogen silsesquioxane for depositing a coating
Patent #: 5279661
Issued on: 01/18/1994
Inventor: Gentle
Variable resistors
Patent #: 5283545
Issued on: 02/01/1994
Inventor: Pernisz
Coatings for microelectronic devices and substrates
Patent #: 5290354
Issued on: 03/01/1994
Inventor: Haluska
Ceramic thin film memory device
Patent #: 5293335
Issued on: 03/08/1994
Inventor: Pernisz, et al.
Vapor phase deposition of hydrogen silsesquioxane resin in the presence of nitrous oxide
Patent #: 5310583
Issued on: 05/10/1994
Inventor: Eckstein, et al.
Threshold switching device
Patent #: 5312684
Issued on: 05/17/1994
Inventor: Michael, et al.
Method of forming SI-O containing coatings
Patent #: 5320868
Issued on: 06/14/1994
Inventor: Ballance, et al.
Low temperature process for the formation of ceramic coatings
Patent #: 5336532
Issued on: 08/09/1994
Inventor: Haluska, et al.
Photodelineable coatings from hydrogen silsesquioxane resin
Patent #: 5348839
Issued on: 09/20/1994
Inventor: Haluska, et al.
Method for the formation of a silicon oxide film
Patent #: 5370903
Issued on: 12/06/1994
Inventor: Mine, et al.
Method for the formation of silicon oxide films
Patent #: 5370904
Issued on: 12/06/1994
Inventor: Mine, et al.
Method for the formation of a silicon oxide film
Patent #: 5372842
Issued on: 12/13/1994
Inventor: Mine, et al.
Hermetic coatings by heating hydrogen silsesquinoxane resin in an inert atmosphere
Patent #: 5380567
Issued on: 01/10/1995
Inventor: Haluska
Method for the molecular weight fractionation of polyhydrogen silsesquioxane
Patent #: 5416190
Issued on: 05/16/1995
Inventor: Mine, et al.
Curing silicon hydride containing materials by exposure to nitrous oxide
Patent #: 5436029
Issued on: 07/25/1995
Inventor: Ballance, et al.
Method of forming Si-O containing coatings
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Issued on: 08/15/1995
Inventor: Ballance, et al.
Ceramic coatings
Patent #: 5445894
Issued on: 08/29/1995
Inventor: Haluska, et al.
Precursor for ceramic coatings
Patent #: 5446088
Issued on: 08/29/1995
Inventor: Haluska
High purity polyhydrogen silsesquioxane resin for electronic coatings
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Issued on: 01/23/1996
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Low dielectric constant coatings
Patent #: 5523163
Issued on: 06/04/1996
Inventor: Ballance, et al.
Method of coating a substrate with ceramic coating
Patent #: 5540948
Issued on: 07/30/1996
Inventor: Haluska
5547703
Method of sealing integrated circuits
Patent #: 5563102
Issued on: 10/08/1996
Inventor: Michael
Curing hydrogen silsesquioxane resin with an electron beam
Patent #: 5609925
Issued on: 03/11/1997
Inventor: Camilletti, et al.
Hydrogen silsesquioxane resin coating composition
Patent #: 5618878
Issued on: 04/08/1997
Inventor: Syktich, et al.
Electronic coating materials using mixed polymers
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Inventor: Haluska, et al.
5660895
Production of low molecular weight linear hydrogen siloxanes
Patent #: 5670596
Issued on: 09/23/1997
Inventor: Razzano, et al.
Method of producing coatings on electronic substrates
Patent #: 5707681
Issued on: 01/13/1998
Inventor: Bremmer, et al.
Electronic coating composition method of coating an electronic substrate, composition and article
Patent #: 5707683
Issued on: 01/13/1998
Inventor: Currie, et al.
Method of using siloxane polymers
Patent #: 5853808
Issued on: 12/29/1998
Inventor: Arkles, et al.
Spherosiloxane coatings
Patent #: 5858544
Issued on: 01/12/1999
Inventor: Banaszak Holl, et al.
Silicone ladder polymer and process for producing the same
Patent #: 5859162
Issued on: 01/12/1999
Inventor: Yamamoto, et al.
Novolak type phenolic resins and methods of manufacturing thereof
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Issued on: 01/12/1999
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Method of manufacturing semiconductor device
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Semiconductor device and method of producing the same
Patent #: 5942802
Issued on: 08/24/1999
Inventor: Aoi
Low pressure baked HSQ gap fill layer following barrier layer deposition for high integrity borderless vias
Patent #: 6046104
Issued on: 04/04/2000
Inventor: Kepler
Coating liquid for forming porous silica coating, coated substrate and short fiber silica
Patent #: 6083314
Issued on: 07/04/2000
Inventor: Nakashima, et al.
Method of manufacturing a semiconductor device with a low permittivity dielectric layer and contamination due to exposure to water
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Issued on: 09/12/2000
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Alcohol based precursors for producing nanoporous silica thin films
Patent #: 6126733
Issued on: 10/03/2000
Inventor: Wallace, et al.
Method and apparatus for upper level substrate isolation integrated with bulk silicon
Patent #: 6140163
Issued on: 10/31/2000
Inventor: Gardner, et al.
Silicon-rich block copolymers to achieve unbalanced vias
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Issued on: 11/07/2000
Inventor: Pan, et al.
Forming halogen doped glass dielectric layer with enhanced stability
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Issued on: 12/26/2000
Inventor: Jang
Method for making microporous silicone resins with narrow pore-size distributions
Patent #: 6197913
Issued on: 03/06/2001
Inventor: Zhong
Method of forming coatings
Patent #: 6231989
Issued on: 05/15/2001
Inventor: Chung, et al.
Method and material for integration of fuorine-containing low-k dielectrics
Patent #: 6265779
Issued on: 07/24/2001
Inventor: Grill, et al.
Method of forming fluorosilicate glass (FSG) layers with moisture-resistant capability
Patent #: 6284677
Issued on: 09/04/2001
Inventor: Hsiao, et al.
Methods to improve chemical vapor deposited fluorosilicate glass (FSG) film adhesion to metal barrier or etch stop/diffusion barrier layers Patent #: 6303518
Issued on: 10/16/2001
Inventor: Tian, et al.