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US Patent 6423102 - Jig used for assembling semiconductor devices

US Patent Issued on July 23, 2002
Estimated Patent Expiration Date: Icon_subject December 9, 2017Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

A jig used for assembling semiconductor devices has an arrangement wherein the first semiconductor integrated circuit chip, which is die-bonded and wire-bonded onto one surface of a lead frame, is fitted to the inner section of a support stage and is supported by an elastic member that is designed to be higher than the inner section, while the lead frame is supported by the outer section of the support stage. In this state, the second semiconductor integrated circuit chip is die-bonded onto the other surface of the lead frame by applying pressure by means of a bonding collet. Thus, it becomes possible to prevent cracks that may be caused in a passivation film and also to improve the reliability and the final yield of semiconductor devices.

Inventors

Application

No. 987054 filed on 12/09/1997

US Classes:

29/25.01, BARRIER LAYER OR SEMICONDUCTOR DEVICE MAKING269/21, Vacuum-type holding means277/910O-RING SEAL

Field of Search

29/25.01, BARRIER LAYER OR SEMICONDUCTOR DEVICE MAKING269/21, Vacuum-type holding means277/910O-RING SEAL

Examiners

Primary: Graybill, David E.

US Patent References

2730370, 4357006, Distortion free 3 point vacuum fixture
Issued on: 11/02/1982
Inventor: Hayes
4470856, Self-compensating hydrostatic flattening of semiconductor substrates
Issued on: 09/11/1984
Inventor: Little ,   et al.
4763188, Packaging system for multiple semiconductor devices
Issued on: 08/09/1988
Inventor: Johnson
4795518, Method using a multiple device vacuum chuck for an automatic microelectronic bonding apparatus
Issued on: 01/03/1989
Inventor: Meinel ,   et al.
4949783, Substrate transport and cooling apparatus and method for same
Issued on: 08/21/1990
Inventor: Lakios, et al.
4968375, Etching apparatus
Issued on: 11/06/1990
Inventor: Sato, et al.
5034350, Semiconductor device package with dies mounted on both sides of the central pad of a metal frame
Issued on: 07/23/1991
Inventor: Marchisi
5147815, Method for fabricating a multichip semiconductor device having two interdigitated leadframes
Issued on: 09/15/1992
Inventor: Casto
5173766, Semiconductor device package and method of making such a package
Issued on: 12/22/1992
Inventor: Long, et al.
5273938, Method for attaching conductive traces to plural, stacked, encapsulated semiconductor die using a removable transfer film
Issued on: 12/28/1993
Inventor: Lin, et al.
5366933, Method for constructing a dual sided, wire bonded integrated circuit chip package
Issued on: 11/22/1994
Inventor: Golwalkar, et al.
5437777, Apparatus for forming a metal wiring pattern of semiconductor devices
Issued on: 08/01/1995
Inventor: Kishi
5527740, Manufacturing dual sided wire bonded integrated circuit chip packages using offset wire bonds and support block cavities
Issued on: 06/18/1996
Inventor: Golwalkar, et al.
5759873Method of manufacturing chip-size package-type semiconductor device
Issued on: 06/02/1998
Inventor: Kata, et al.

Foreign Patent References

  • 4026244 EP. 02/09/1992
  • 58110048 JP. 06/09/1983
  • 58142537 JP. 08/09/1983
  • 6191936 JP. 05/09/1986
  • 62219531 JP. 09/09/1987
  • 1218032 JP. 08/09/1989
  • 5121462 JP. 05/09/1993

International Classes

H01L 021/00
H01L 021/64
B25B 011/00

Foreign Application Priority Data

1994-11-30 JP

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