Process flow preparation system and method
February 16, 2019. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesReal world modeling and control process System for managing production of semiconductor devices System for automatically producing different semiconductor products in different quantities through a plurality of processes along a production line Non-volatile ferroelectric memory device equipped with reference voltage generator for exactly regulating reference voltage to the mid point between two logic level and method of reading out data bit therefrom System for preparing production process flow Method and apparatus for integrated control of a sensor in a manufacturing processing station Sequencing of the recipe steps for the optimal low-k HDP-CVD processing Automatic recipe adjust and download based on process control window Semiconductor product manufacturing execution system and semiconductor product manufacturing method Patent #: 6112130 InventorApplicationNo. 249851 filed on 02/16/1999US Classes:700/96, Integrated system (Computer Integrated Manufacturing (CIM)700/121Integrated circuit production or semiconductor fabricationExaminersPrimary: Picard, Leo P.Assistant: Rapp, Chad Attorney, Agent or FirmInternational ClassG06F 019/00Foreign Application Priority Data1998-02-17 JPAbstractA process flow preparation system including a condition receiving unit for receiving and storing at least one process condition, a recipe storing unit for storing recipe names and corresponding process conditions, a recipe searching unit for searching and retrieving from the recipe storing unit at least one recipe meeting the at least one process condition. Also included is a process sequence receiving unit for receiving and storing a process sequence of the at least one retrieved recipe, and a process flow output unit for outputting a process flow including the at least one retrieved recipe and the process sequence of the at least one retrieved recipe. Further, the recipe searching unit searches for one or more recipes meeting the at least one process condition from the recipe storing unit, determines whether or not the search has retrieved a single result, and prompts an operator to input at least one of a process condition name and a process condition value for specifying results of the search.Other References
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