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Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor

Patent 6401526 Issued on June 11, 2002. Estimated Expiration Date: Icon_subject December 10, 2019. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

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Inventors

Assignee

Application

No. 467096 filed on 12/10/1999

US Classes:

73/105, Roughness423/447.3From gaseous reactants

Examiners

Primary: Williams, Hezron
Assistant: Cygan, Michael

Foreign Patent References

  • 0913508 EP 10/12/1988
  • 9805920 WO 02/12/1998

International Classes

G01B 005/028
D01C 005/00
D01F 009/12

Abstract

Single-walled carbon nanotube (SWNT) probe-tips for atomic force microscopy (AFM) are realized by direct synthesis of SWNTs on silicon pyramids integrated onto AFM cantilevers. The growth of SWNT tips involves dip coating of silicon pyramids with a liquid phase catalyst followed by chemical vapor deposition (CVD) using methane. Van der Waals interactions between the silicon pyramidal surface and the nanotube ensure proper SWNT orientation. Production of large scale arrays of nanotube probe tips using contact printing and controllably shortening nanotubes in an inert discharge are also described.

Other References

  • J. Hafner, C. Cheung, C. Lieber, Nature 398 (1999) 761-762
  • J. Hafner, C. Cheung, C. M. Lieber, J. Am. Chen, Soc. 1999 121(1999) 9750-975
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