System and method of operation of a digital mass flow controller
Patent 6343617 Issued on February 5, 2002. Estimated Expiration Date: 
July 9, 2019. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
July 9, 2019. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesIntelligent mass flow controller Flow controller, parts of flow controller, and related method Method of making a flow controller Flow controller, parts of flow controller, and related method Thermal mass flowmeter and mass flow controller, flowmetering system and method Method and apparatus for detecting and controlling mass flow Patent #: 5944048 InventorsAssigneeApplicationNo. 350744 filed on 07/09/1999US Classes:137/486, Responsive to change in rate of fluid flow137/487.5Electrically actuated valveExaminersPrimary: Michalsky, Gerald A.Attorney, Agent or FirmForeign Patent References
International ClassG05D 007/06AbstractThe mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve with a control signal to regulate a first gas flow through the control valve. | |
